JPS62174929A - 半導体記憶装置の製造方法 - Google Patents

半導体記憶装置の製造方法

Info

Publication number
JPS62174929A
JPS62174929A JP1233487A JP1233487A JPS62174929A JP S62174929 A JPS62174929 A JP S62174929A JP 1233487 A JP1233487 A JP 1233487A JP 1233487 A JP1233487 A JP 1233487A JP S62174929 A JPS62174929 A JP S62174929A
Authority
JP
Japan
Prior art keywords
film
resin
semiconductor substrate
semiconductor
transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1233487A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6330786B2 (enrdf_load_stackoverflow
Inventor
Tatsumi Shirasu
白須　辰美
Yasunobu Osa
小佐　保信
Tokio Kato
加藤　登季男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1233487A priority Critical patent/JPS62174929A/ja
Publication of JPS62174929A publication Critical patent/JPS62174929A/ja
Publication of JPS6330786B2 publication Critical patent/JPS6330786B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
JP1233487A 1987-01-23 1987-01-23 半導体記憶装置の製造方法 Granted JPS62174929A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1233487A JPS62174929A (ja) 1987-01-23 1987-01-23 半導体記憶装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1233487A JPS62174929A (ja) 1987-01-23 1987-01-23 半導体記憶装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP3548079A Division JPS55128851A (en) 1979-03-28 1979-03-28 Semiconductor memory device

Publications (2)

Publication Number Publication Date
JPS62174929A true JPS62174929A (ja) 1987-07-31
JPS6330786B2 JPS6330786B2 (enrdf_load_stackoverflow) 1988-06-21

Family

ID=11802405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1233487A Granted JPS62174929A (ja) 1987-01-23 1987-01-23 半導体記憶装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62174929A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6330786B2 (enrdf_load_stackoverflow) 1988-06-21

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