JPS6217455Y2 - - Google Patents
Info
- Publication number
- JPS6217455Y2 JPS6217455Y2 JP16798082U JP16798082U JPS6217455Y2 JP S6217455 Y2 JPS6217455 Y2 JP S6217455Y2 JP 16798082 U JP16798082 U JP 16798082U JP 16798082 U JP16798082 U JP 16798082U JP S6217455 Y2 JPS6217455 Y2 JP S6217455Y2
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- glass tube
- reaction chamber
- ports
- degrees
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011521 glass Substances 0.000 claims description 41
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000012545 processing Methods 0.000 description 15
- 239000004743 Polypropylene Substances 0.000 description 6
- 229920001155 polypropylene Polymers 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 239000004698 Polyethylene Substances 0.000 description 4
- 230000036470 plasma concentration Effects 0.000 description 4
- 229920000573 polyethylene Polymers 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000009832 plasma treatment Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000010422 painting Methods 0.000 description 2
- -1 polypropylene Polymers 0.000 description 2
- 238000004873 anchoring Methods 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16798082U JPS5973342U (ja) | 1982-11-08 | 1982-11-08 | プラズマ処理を施す装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16798082U JPS5973342U (ja) | 1982-11-08 | 1982-11-08 | プラズマ処理を施す装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5973342U JPS5973342U (ja) | 1984-05-18 |
| JPS6217455Y2 true JPS6217455Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-05-06 |
Family
ID=30367360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16798082U Granted JPS5973342U (ja) | 1982-11-08 | 1982-11-08 | プラズマ処理を施す装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5973342U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1982
- 1982-11-08 JP JP16798082U patent/JPS5973342U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5973342U (ja) | 1984-05-18 |