JPS62174211U - - Google Patents
Info
- Publication number
- JPS62174211U JPS62174211U JP6276286U JP6276286U JPS62174211U JP S62174211 U JPS62174211 U JP S62174211U JP 6276286 U JP6276286 U JP 6276286U JP 6276286 U JP6276286 U JP 6276286U JP S62174211 U JPS62174211 U JP S62174211U
- Authority
- JP
- Japan
- Prior art keywords
- wavelength
- light source
- intensity
- measured
- value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は本考案に係る微小間隙測定装置の一実
施例を示す構成ブロツク図、第２図は浮上量を変
えたときの理論上の反射光強度の入射光波長に対
する変化を示す特性曲線図、第３図は本考案の測
定の手順を示すフローチヤート、第４図は反射光
強度の理論値と実測値の一致の程度を示す特性曲
線図、第５図は従来技術の構成を示す構成ブロツ
ク図、第６図は従来技術における入射光の波長と
反射光強度の関係を示す特性曲線図、第７図は本
考案の他の応用例を説明するための原理説明図。
２……ガラスデイスク、３……ヘツド、４……
光源、９……光検出器、１０……メモリ、１１…
…計算機、１３……モノクロメータ、２０……演
算手段、２１……比較手段、２２……透明薄膜、
２３……反射膜、ｈ……浮上量、λ……波長。
Fig. 1 is a configuration block diagram showing an embodiment of the micro gap measuring device according to the present invention, and Fig. 2 is a characteristic curve diagram showing the change in theoretical reflected light intensity with respect to the incident light wavelength when the flying height is changed. , Fig. 3 is a flowchart showing the measurement procedure of the present invention, Fig. 4 is a characteristic curve diagram showing the degree of agreement between the theoretical value and the measured value of reflected light intensity, and Fig. 5 is a configuration showing the configuration of the conventional technology. FIG. 6 is a characteristic curve diagram showing the relationship between the wavelength of incident light and the intensity of reflected light in the prior art, and FIG. 7 is a principle explanatory diagram for explaining another example of application of the present invention. 2...Glass disk, 3...Head, 4...
Light source, 9... Photodetector, 10... Memory, 11...
... Calculator, 13 ... Monochromator, 20 ... Calculation means, 21 ... Comparison means, 22 ... Transparent thin film,
23...Reflection film, h...Flying height, λ...Wavelength.
Claims (1)
力光を被測定物に導く光学系と、前記被測定物の
異なる２面からの反射光の強度を測定する光検出
器を有し、前記単色光源の波長を変化したとき前
記光検出器から得られる波長特性から前記異なる
２面の間隙を測定する微小間隙測定装置において
、前記被測定物への入射光の波長を変化したとき
の前記反射光強度の理論値を演算する演算手段と
、この演算手段から出力される反射光強度の理論
値と前記単色光源の出力光の波長を変化したとき
の前記反射光強度の実測値との偏差を求める比較
手段を有し、前記偏差を小さくするような理論演
算用の間隙値を測定間隙値として出力するように
構成したことを特徴とする微小間隙測定装置。 The monochromatic light source has a variable wavelength monochromatic light source, an optical system that guides output light from the monochromatic light source to a measured object, and a photodetector that measures the intensity of reflected light from two different surfaces of the measured object. In a micro gap measuring device that measures the gap between the two different surfaces from the wavelength characteristics obtained from the photodetector when the wavelength of the light source is changed, the reflected light when the wavelength of the light incident on the object to be measured is changed. A calculation means for calculating a theoretical value of intensity, and a deviation between the theoretical value of reflected light intensity outputted from this calculation means and the actual measured value of the reflected light intensity when the wavelength of the output light of the monochromatic light source is changed. A micro gap measuring device comprising a comparing means and configured to output a gap value for theoretical calculation that reduces the deviation as a measured gap value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6276286U JPS62174211U (en) | 1986-04-25 | 1986-04-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6276286U JPS62174211U (en) | 1986-04-25 | 1986-04-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62174211U true JPS62174211U (en) | 1987-11-05 |
Family
ID=30897348
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6276286U Pending JPS62174211U (en) | 1986-04-25 | 1986-04-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62174211U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05231828A (en) * | 1992-02-21 | 1993-09-07 | Hitachi Electron Eng Co Ltd | Method for measuring amount of floating of magnetic head |
| JPH0765331A (en) * | 1993-08-19 | 1995-03-10 | Internatl Business Mach Corp <Ibm> | Measuring method of quantity of magnetic head floated |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59178304A (en) * | 1983-03-30 | 1984-10-09 | Hitachi Ltd | Minute gap measuring method and apparatus therefor |
-
1986
- 1986-04-25 JP JP6276286U patent/JPS62174211U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59178304A (en) * | 1983-03-30 | 1984-10-09 | Hitachi Ltd | Minute gap measuring method and apparatus therefor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05231828A (en) * | 1992-02-21 | 1993-09-07 | Hitachi Electron Eng Co Ltd | Method for measuring amount of floating of magnetic head |
| JPH0765331A (en) * | 1993-08-19 | 1995-03-10 | Internatl Business Mach Corp <Ibm> | Measuring method of quantity of magnetic head floated |
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