JPS62172650A - 集束イオンビ−ム装置 - Google Patents

集束イオンビ−ム装置

Info

Publication number
JPS62172650A
JPS62172650A JP61012785A JP1278586A JPS62172650A JP S62172650 A JPS62172650 A JP S62172650A JP 61012785 A JP61012785 A JP 61012785A JP 1278586 A JP1278586 A JP 1278586A JP S62172650 A JPS62172650 A JP S62172650A
Authority
JP
Japan
Prior art keywords
ion beam
mass
voltage
separator
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61012785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0562419B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Sawaragi
宏 澤良木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP61012785A priority Critical patent/JPS62172650A/ja
Publication of JPS62172650A publication Critical patent/JPS62172650A/ja
Publication of JPH0562419B2 publication Critical patent/JPH0562419B2/ja
Granted legal-status Critical Current

Links

JP61012785A 1986-01-23 1986-01-23 集束イオンビ−ム装置 Granted JPS62172650A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61012785A JPS62172650A (ja) 1986-01-23 1986-01-23 集束イオンビ−ム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61012785A JPS62172650A (ja) 1986-01-23 1986-01-23 集束イオンビ−ム装置

Publications (2)

Publication Number Publication Date
JPS62172650A true JPS62172650A (ja) 1987-07-29
JPH0562419B2 JPH0562419B2 (enrdf_load_stackoverflow) 1993-09-08

Family

ID=11815048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61012785A Granted JPS62172650A (ja) 1986-01-23 1986-01-23 集束イオンビ−ム装置

Country Status (1)

Country Link
JP (1) JPS62172650A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6330800A (ja) * 1986-07-24 1988-02-09 日電アネルバ株式会社 Ｅｘｂ速度選別器
JPH0195458A (ja) * 1987-10-06 1989-04-13 Yokogawa Electric Corp 四重極質量分析器を用いたイオン注入装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58158852A (ja) * 1982-03-17 1983-09-21 Jeol Ltd 荷電粒子フイルタ
JPS6074249A (ja) * 1983-09-29 1985-04-26 Jeol Ltd イオンビ−ム装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58158852A (ja) * 1982-03-17 1983-09-21 Jeol Ltd 荷電粒子フイルタ
JPS6074249A (ja) * 1983-09-29 1985-04-26 Jeol Ltd イオンビ−ム装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6330800A (ja) * 1986-07-24 1988-02-09 日電アネルバ株式会社 Ｅｘｂ速度選別器
JPH0195458A (ja) * 1987-10-06 1989-04-13 Yokogawa Electric Corp 四重極質量分析器を用いたイオン注入装置

Also Published As

Publication number Publication date
JPH0562419B2 (enrdf_load_stackoverflow) 1993-09-08

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