JPS6217124U - - Google Patents

Info

Publication number
JPS6217124U
JPS6217124U JP10692085U JP10692085U JPS6217124U JP S6217124 U JPS6217124 U JP S6217124U JP 10692085 U JP10692085 U JP 10692085U JP 10692085 U JP10692085 U JP 10692085U JP S6217124 U JPS6217124 U JP S6217124U
Authority
JP
Japan
Prior art keywords
opening
closing lid
spin dryer
swinging arms
swinging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10692085U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10692085U priority Critical patent/JPS6217124U/ja
Publication of JPS6217124U publication Critical patent/JPS6217124U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す一部切断平面
図、第２図及び第３図はそれぞれ第１図の要部の
側面図、第４図は従来の半導体自動処理装置の一
部を示す説明正面図、第５図は第４図の側面図で
ある。 １…スピンドライヤ本体、２…揺動アーム、３
…軸受、４…回動軸、５…エアシリンダー、６…
連結アーム、７…軸、８…開閉蓋、９…軸受、１
０…ピン、１１…取つ手、１２…ステー、１３…
チヤンバ、１４…ターンテーブル、２１…スピン
ドライヤ、２２…チヤンバ、２３…開閉蓋、２４
…アーム、２５…キヤリア、２６…ターンテーブ
ル。

Claims (1)

    【実用新案登録請求の範囲】
  1. 遠心力により脱水を行うスピンドライヤ上に、
    一端を支点として、上下に揺動する一対の揺動ア
    ームを設け、該揺動アームの他端の間に開閉蓋を
    回動自在に枢着すると共に、揺動アームと開閉蓋
    とを互いに固定、解除できるように構成したこと
    を特徴とするスピンドライヤの開閉蓋。
JP10692085U 1985-07-15 1985-07-15 Pending JPS6217124U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10692085U JPS6217124U (ja) 1985-07-15 1985-07-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10692085U JPS6217124U (ja) 1985-07-15 1985-07-15

Publications (1)

Publication Number Publication Date
JPS6217124U true JPS6217124U (ja) 1987-02-02

Family

ID=30982723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10692085U Pending JPS6217124U (ja) 1985-07-15 1985-07-15

Country Status (1)

Country Link
JP (1) JPS6217124U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012057893A (ja) * 2010-09-10 2012-03-22 Sugino Machine Ltd 減圧乾燥機
JP2015064130A (ja) * 2013-09-24 2015-04-09 株式会社スギノマシン 減圧乾燥機

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS558052A (en) * 1978-06-30 1980-01-21 Mitsubishi Electric Corp Rotary washer-drier
US4217732A (en) * 1977-10-07 1980-08-19 Reichstadt Hans U Roof window

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4217732A (en) * 1977-10-07 1980-08-19 Reichstadt Hans U Roof window
JPS558052A (en) * 1978-06-30 1980-01-21 Mitsubishi Electric Corp Rotary washer-drier

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012057893A (ja) * 2010-09-10 2012-03-22 Sugino Machine Ltd 減圧乾燥機
JP2015064130A (ja) * 2013-09-24 2015-04-09 株式会社スギノマシン 減圧乾燥機

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