JPS6217121U - - Google Patents
Info
- Publication number
- JPS6217121U JPS6217121U JP10778285U JP10778285U JPS6217121U JP S6217121 U JPS6217121 U JP S6217121U JP 10778285 U JP10778285 U JP 10778285U JP 10778285 U JP10778285 U JP 10778285U JP S6217121 U JPS6217121 U JP S6217121U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- stage
- exposure mask
- detection means
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 2
- 230000005855 radiation Effects 0.000 claims 2
- 239000012857 radioactive material Substances 0.000 claims 1
- 239000000941 radioactive substance Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10778285U JPS6217121U (th) | 1985-07-15 | 1985-07-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10778285U JPS6217121U (th) | 1985-07-15 | 1985-07-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6217121U true JPS6217121U (th) | 1987-02-02 |
Family
ID=30984376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10778285U Pending JPS6217121U (th) | 1985-07-15 | 1985-07-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6217121U (th) |
-
1985
- 1985-07-15 JP JP10778285U patent/JPS6217121U/ja active Pending
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