JPS62170759U - - Google Patents
Info
- Publication number
- JPS62170759U JPS62170759U JP6085886U JP6085886U JPS62170759U JP S62170759 U JPS62170759 U JP S62170759U JP 6085886 U JP6085886 U JP 6085886U JP 6085886 U JP6085886 U JP 6085886U JP S62170759 U JPS62170759 U JP S62170759U
- Authority
- JP
- Japan
- Prior art keywords
- section
- susceptor
- heating
- bell gear
- reaction gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 9
- 239000012495 reaction gas Substances 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6085886U JPS62170759U (zh) | 1986-04-21 | 1986-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6085886U JPS62170759U (zh) | 1986-04-21 | 1986-04-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62170759U true JPS62170759U (zh) | 1987-10-29 |
Family
ID=30893654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6085886U Pending JPS62170759U (zh) | 1986-04-21 | 1986-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62170759U (zh) |
-
1986
- 1986-04-21 JP JP6085886U patent/JPS62170759U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS62170759U (zh) | ||
| JPH0321844U (zh) | ||
| JPS60119743U (ja) | 化学的気相付着装置 | |
| JPS61177440U (zh) | ||
| JPS6422025U (zh) | ||
| JPS60106335U (ja) | プラズマｃｖｄ装置 | |
| JPH0256434U (zh) | ||
| JPH03120030U (zh) | ||
| JPS63127121U (zh) | ||
| JPH0299963U (zh) | ||
| JPS648909U (zh) | ||
| JPH03110834U (zh) | ||
| JPS633136U (zh) | ||
| JPS63154664U (zh) | ||
| JPS62170762U (zh) | ||
| JPS63106757U (zh) | ||
| JPS60924U (ja) | 気相成長装置 | |
| JPS5948040U (ja) | 熱処理装置 | |
| JPH0339833U (zh) | ||
| JPS5812941U (ja) | 気相成長装置用サセプタ | |
| JPS61158947U (zh) | ||
| JPS62190335U (zh) | ||
| JPH0187173U (zh) | ||
| JPH0226228U (zh) | ||
| JPS6244434U (zh) |