JPS62170627U - - Google Patents

Info

Publication number

JPS62170627U

JPS62170627U JP5832186U JP5832186U JPS62170627U JP S62170627 U JPS62170627 U JP S62170627U JP 5832186 U JP5832186 U JP 5832186U JP 5832186 U JP5832186 U JP 5832186U JP S62170627 U JPS62170627 U JP S62170627U

Authority

JP

Japan

Prior art keywords

susceptor

metal material

carbon

utility

vapor phase

Prior art date

1986-04-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000007769 metal material Substances 0.000 claims description 3
• 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
• 229910052799 carbon Inorganic materials 0.000 claims 2
• 238000001947 vapour-phase growth Methods 0.000 claims 2
• 229910052782 aluminium Inorganic materials 0.000 claims 1
• 229910052738 indium Inorganic materials 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1

Cited By (1)