JPS62170543U - - Google Patents
Info
- Publication number
- JPS62170543U JPS62170543U JP6032586U JP6032586U JPS62170543U JP S62170543 U JPS62170543 U JP S62170543U JP 6032586 U JP6032586 U JP 6032586U JP 6032586 U JP6032586 U JP 6032586U JP S62170543 U JPS62170543 U JP S62170543U
- Authority
- JP
- Japan
- Prior art keywords
- injection means
- gas injection
- opening
- tip
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 6
- 238000002347 injection Methods 0.000 claims description 4
- 239000007924 injection Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986060325U JPH0439555Y2 (sl) | 1986-04-21 | 1986-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986060325U JPH0439555Y2 (sl) | 1986-04-21 | 1986-04-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62170543U true JPS62170543U (sl) | 1987-10-29 |
| JPH0439555Y2 JPH0439555Y2 (sl) | 1992-09-16 |
Family
ID=30892639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986060325U Expired JPH0439555Y2 (sl) | 1986-04-21 | 1986-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0439555Y2 (sl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2007125756A1 (ja) * | 2006-04-26 | 2009-09-10 | 東京エレクトロン株式会社 | 微小構造体の検査装置、及び微小構造体の検査方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5745472A (en) * | 1980-09-02 | 1982-03-15 | Matsushita Electric Ind Co Ltd | Pressure-sensitive element inspection device |
| JPS57122546U (sl) * | 1981-01-23 | 1982-07-30 |
-
1986
- 1986-04-21 JP JP1986060325U patent/JPH0439555Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5745472A (en) * | 1980-09-02 | 1982-03-15 | Matsushita Electric Ind Co Ltd | Pressure-sensitive element inspection device |
| JPS57122546U (sl) * | 1981-01-23 | 1982-07-30 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2007125756A1 (ja) * | 2006-04-26 | 2009-09-10 | 東京エレクトロン株式会社 | 微小構造体の検査装置、及び微小構造体の検査方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0439555Y2 (sl) | 1992-09-16 |