JPS62169436A - Device for positioning semiconductor chip - Google Patents

Device for positioning semiconductor chip

Info

Publication number
JPS62169436A
JPS62169436A JP986686A JP986686A JPS62169436A JP S62169436 A JPS62169436 A JP S62169436A JP 986686 A JP986686 A JP 986686A JP 986686 A JP986686 A JP 986686A JP S62169436 A JPS62169436 A JP S62169436A
Authority
JP
Japan
Prior art keywords
positioning
semiconductor chip
guide
semiconductor chips
movable guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP986686A
Other languages
Japanese (ja)
Inventor
Masaki Fujinaka
藤中 政喜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP986686A priority Critical patent/JPS62169436A/en
Publication of JPS62169436A publication Critical patent/JPS62169436A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To make it possible to position a plurality of semiconductor chips at a time within a small space by providing a fixing guide having plural L- shaped positioning parts and a movable guide having plural positioning clicks for pressing semiconductor chips against the fixing guide from another side of the fixing guide to bring them into contact with the guide. CONSTITUTION:In a position B near a positioning point on a stage 50, semiconductor chips 10a-10c are mounted. Next, positioning clicks 30a-30c of a movable guide 20 are moved toward positioning parts of L-shaped fixing guides 401-40c and the positioning operation of the semiconductor chips 10a-10c to accurate positions is performed. Thus, the positioning operation of plural semiconductor chips can be effected at a time.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、半導体チップを組立る際に複数の半導体チッ
プの位置決めを同時におこなう半導体チップ位置決め装
置に関する〇 〔従来の技術〕 第6図は、従来の半導体チップ位置決め装置の一例を示
す平面図である。(1)は正方形状の半導体チップ、(
2a)=(2b)は第1軸方向に移動する位置決め爪、
(3m)、(3b)は第■軸′方向に移動する位置決め
爪である。(4)はステージであり、(4)はステージ
(4)のほぼ中央部である。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a semiconductor chip positioning device that simultaneously positions a plurality of semiconductor chips when assembling semiconductor chips. 1 is a plan view showing an example of a conventional semiconductor chip positioning device. (1) is a square semiconductor chip, (
2a) = (2b) is a positioning claw that moves in the first axis direction;
(3m) and (3b) are positioning claws that move in the direction of the {circle around (2)} axis. (4) is a stage, and (4) is approximately at the center of stage (4).

この装置により半導体チップ(1)の位置決めをおこな
うには、まずステージ(4)のほぼ中央部■に半導体チ
ップ(1)を載置する。次に半導体チップ(1)の正し
い位置決めをおこなう4個の位置決め爪(2a)、(2
b)、(3a)−(3b)’fr、それぞれの軸方向(
第1軸方向、第2軸方向)の中央に向い移動するように
同期した動きをさせ、半導体チップ(1)の正確な位置
決めをする。
In order to position the semiconductor chip (1) using this device, the semiconductor chip (1) is first placed on the stage (4) at approximately the center part (2). Next, four positioning claws (2a), (2) are used to correctly position the semiconductor chip (1).
b), (3a)-(3b)'fr, each axial direction (
The semiconductor chip (1) is accurately positioned by performing synchronized movements toward the center in the first axis direction and second axis direction.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上記のように構成した従来の半導体チップ位置決め装置
によれば、4個の位置決め(2a)、(2b)。
According to the conventional semiconductor chip positioning device configured as described above, four positions (2a) and (2b) are performed.

(3g)、(3b)が同期した運動全おこなわねばなら
ず、また駆動部が2個所必要である。このため1つの半
導体チップの位置決めしか出来ず、一度に複数個の半導
体チップを位置決めするには、複雑な機構や大きなスペ
ースが要求される等の問題があった。
(3g) and (3b) must perform all movements in synchronization, and two driving parts are required. Therefore, only one semiconductor chip can be positioned, and positioning a plurality of semiconductor chips at once requires a complicated mechanism and a large space.

本発明は上記の問題点を解決するためになされたもので
、装置の構造が簡単なうえ半導体チップを一度に約数し
かも小スペースで位置決めできる半導体チップ位置決め
装置を得ることを目的とする。
The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a semiconductor chip positioning device which has a simple structure and can position a divisor of semiconductor chips at a time in a small space.

〔問題点を解決するための手段〕[Means for solving problems]

本発明は上記の目的を達成するためになされたもので、
複数個のL字型の位置決め部を有する固定ガイドと、該
固定ガイドに対し該固定ガイドの他方より半導体チップ
を押圧し轟接する複数個の位置決め爪を有する可動ガイ
ドとを設け、前記複数個の半導体チップ全同時に位置決
めするようにした半導体チップ位置決め装置を提供する
ものであるQ 〔作用〕 ステージ上の位置決めポイント付辺に複数の半導体チッ
プラ取置し、この半導体チップ全固定ガイドの位置決め
部と可動ガイドの位置決め爪で同時に位置決めする。
The present invention has been made to achieve the above objects,
A fixed guide having a plurality of L-shaped positioning parts, and a movable guide having a plurality of positioning claws that press and contact the semiconductor chip from the other side of the fixed guide with respect to the fixed guide, This is a semiconductor chip positioning device that positions all semiconductor chips at the same time. [Operation] A plurality of semiconductor chips are placed on the side of the stage near the positioning point, and the positioning part and movable part of the semiconductor chip all-fixed guide are installed. Position them at the same time using the positioning claws on the guide.

〔実施例〕〔Example〕

第1図(a) 、 (b)は、それぞれ本発明の実施例
2示す作用説明図である。(10a)、(10b)、(
10c)は正方形状をなす半導体チップ、(4)は可動
ガイド、(50a)、(30b)、(31]c)は可動
ガイドωに一定間隔で設けられ半導体チップ(10a)
、(10b)−(10c)の位置決めをおこなう位置決
め爪である。
FIGS. 1(a) and 1(b) are action explanatory diagrams showing a second embodiment of the present invention, respectively. (10a), (10b), (
10c) is a square-shaped semiconductor chip, (4) is a movable guide, and (50a), (30b), (31]c) are semiconductor chips provided at regular intervals on the movable guide ω (10a).
, (10b)-(10c).

この位置決め爪(30a)、(30b)、(3Qc)は
それぞれ直角に交差する2つの爪部を有している。
The positioning claws (30a), (30b), and (3Qc) each have two claw portions that intersect at right angles.

一方、(40a)、(40b)、(40c)はそれぞれ
L字型形状で半導体チップ(10a)、(10b)−(
10c)を位置決めする位置決め部金有する固定ガイド
である。釦はステージで、ステージ圀上には固定ガイド
(40a)、(40b)、(40c)が固定され、また
可動ガイド(イ)が矢印■または@方向に移動するよう
になっている。
On the other hand, (40a), (40b), and (40c) are L-shaped semiconductor chips (10a), (10b)-(
10c) is a fixed guide having a positioning member for positioning. The button is a stage, and fixed guides (40a), (40b), and (40c) are fixed on the stage wall, and a movable guide (a) moves in the arrow ■ or @ direction.

上記のように構成した本実施例の作用全説明丁れば次の
通りである。まず第1図(a)に示すJ、うに、ステー
ジ輪上の位置決めポイント付近FB)に半導体チップ(
10a)、(10b)、(10c)′fr:載置する。
A complete explanation of the operation of this embodiment configured as described above is as follows. First, place the semiconductor chip (J, near the positioning point FB on the stage wheel) shown in Figure 1(a).
10a), (10b), (10c)'fr: Place.

次に可動ガイド(イ)の位置決め爪(30a)−(30
b)。
Next, positioning claws (30a) - (30
b).

(30e)をL字世の固定ガイド(40a)、(4Qb
)−(40c)の位置決め部方向(矢印■方向)に移動
させ、半導体チップ(10a)−(10b)、(10c
)の正確な位置への位置決め操作をおこなう。第1図(
b)は可動ガイド(20)が停止し半導体チップ(10
a)。
(30e), L-shaped fixed guide (40a), (4Qb)
) - (40c) in the direction of the positioning part (arrow ■ direction), and the semiconductor chips (10a) - (10b), (10c
) to the correct position. Figure 1 (
In b), the movable guide (20) stops and the semiconductor chip (10)
a).

(1o、b ) 、 (10c )を位置決めした状態
を示し、矢印@は可動ガイド■がもとの位置に復帰する
場合の復帰方向を示している。
(1o, b) and (10c) are shown in position, and the arrow @ indicates the return direction when the movable guide ■ returns to its original position.

上記のように位置済め爪を可動ガイドに3個(もしくは
そ−rLJJ上)の9つけまたL字型の固定ガイドをそ
れに対応して6個(もしくはそれ以上)とりつけること
により、一度に複数個の半導体チップの位1a決め操作
をおこなうことが出来る。
By attaching 3 (or 9) pre-positioned claws to the movable guide as described above and correspondingly attaching 6 (or more) L-shaped fixed guides, multiple pieces can be produced at once. The positioning operation 1a of the semiconductor chip can be performed.

第2図(a) 、 (b)は、本発明の他の実施例を示
す作用説明図である。第1図(a) 、 (b)におい
ては、半導体チップの位i斤決め爪(30a)、(30
b)、(30c)は1つの可動ガイド(21に取シ付け
られ第1軸方向と第■軸方向に一体となって移動するよ
うに構成されている。これに対し本実施例に係る位置決
め装置では、第1軸方向と第「軸方向に関して別個に移
動する可動ガイド(位置決め爪)゛が設けられている。
FIGS. 2(a) and 2(b) are operation explanatory diagrams showing another embodiment of the present invention. In FIGS. 1(a) and 1(b), the semiconductor chip positioning claws (30a) and (30
b) and (30c) are attached to one movable guide (21) and are configured to move integrally in the first axis direction and the second axis direction.In contrast, the positioning guide according to this embodiment The device is provided with a movable guide (positioning pawl) that moves separately in the first and second axial directions.

なお、第1図(a) 、 (b)と同み機能の部分:、
では同じ記号?付し説明を省略する。(200a)はス
テージ圀の図中上方向に設けられたiK I =11]
方向eに移動する可動ガイドであυ、(200b)は図
中下方向に設けらルた第■軸方向Oに移動する可動ガイ
ドである。また(300a)、(300b)。
In addition, the parts with the same functions as in Figures 1 (a) and (b):
Is it the same symbol? The attached explanation will be omitted. (200a) is iK I = 11 provided in the upper direction in the figure of the stage area]
The movable guide υ moves in the direction e, and (200b) indicates a movable guide that moves in the direction O of the 2-th axis provided downward in the figure. Also (300a), (300b).

(300c)は可動ガイド(2001L)の端部及びそ
こから一定間隔で設けら几た壌11軸方向に突出した位
置決め爪である。さらに(,300d) 、(3000
)。
(300c) is the end of the movable guide (2001L) and positioning claws that are provided at regular intervals therefrom and protrude in the axial direction of the solid layer 11. Furthermore, (,300d), (3000
).

(300f)&工司動ガイドC2oob)の端部及びそ
こから一定間隔で設けられた第1軸方向に突出した逆り
字型の位置決め爪である。
(300f)&engineer movement guide C2oob) and an inverted-shaped positioning pawl that protrudes in the first axis direction and is provided at regular intervals therefrom.

上記のように構成した本実施例の作用(!l−説明すれ
ば次の通りである。第2図(a)に示すように半導体チ
ップ(10a)、(10b)、(10c)に対し2、可
動ガイド(200a)−(200b)Wr矢印の、の方
向に別個に移動させ位置決めをおこなう。第2図(b)
は位置決めされた状態を示し、矢印の、6はb1動ガイ
ド(20a)、(200b)かもとの位置に復帰する場
合の復帰方向を示している。
The operation of the present embodiment configured as described above (!l) will be explained as follows.As shown in FIG. 2(a), 2 , the movable guide (200a)-(200b) Wr are moved separately in the direction of the arrow to perform positioning. Fig. 2(b)
indicates a positioned state, and arrow 6 indicates the return direction when the b1 movement guides (20a) and (200b) return to their original positions.

本実施例のように、可11のガイド(200a)。As in this embodiment, the guide (200a) is 11.

(200b)が第■軸方向、第11軸方向に対し専用の
位置決め爪を別個に有する場合は、半導体チップ(10
a)等が細長い場合でも、第1図で示す位置決め爪と異
なり精度を良好に維持することができる。
(200b) has separate positioning claws dedicated to the ■th axis direction and the 11th axis direction, the semiconductor chip (10
Even if a) etc. are elongated, good accuracy can be maintained unlike the positioning claw shown in FIG.

〔発明の効果〕〔Effect of the invention〕

以上の説明から明らかなように本発明によれば、第1@
方向と第■軸方向で相対する位置決め爪のうち一方の位
置決め爪を固定し他方の位置決め爪で半導体チップ全位
置決めするようにしたので、装置の構造が簡単なうえ、
半導体チップを一度に多数しかも小スペースで位置決め
出来るという顕著な効果かある。
As is clear from the above description, according to the present invention, the first @
Since one of the positioning nails facing each other in the direction and the second axis direction is fixed, and the other positioning nail is used to position the entire semiconductor chip, the structure of the device is simple, and
It has the remarkable effect of being able to position a large number of semiconductor chips at once in a small space.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(a) 、 (b)は本発明の実施例を示す作用
説明図、@2図(a) 、 (b)は本発明の他の実施
例を示す作用説明図、83図は従来の半導体チップ位置
決め装置の一例を示す平面図である。 (10a)、(10b)、(10c:L”半導゛体チッ
プ、C’G 、(200a)、(200b) ・=可動
ガイド、(30a)。 (30b) 、(30c) 、(300a)、(300
b)。 (300c)、(300d)、(300e)、(300
f)−位置決め爪(40a、)、(40b)、(40c
)−・・固定ガイド、Fi)・・・ステージ。 なお各図中、同一符号は同−又は相当部分を示す・
Figures 1 (a) and (b) are action explanatory diagrams showing an embodiment of the present invention, Figures 2 (a) and (b) are action explanatory diagrams showing another embodiment of the present invention, and Figure 83 is a conventional diagram. 1 is a plan view showing an example of a semiconductor chip positioning device of FIG. (10a), (10b), (10c: L” semiconductor chip, C'G, (200a), (200b) = movable guide, (30a). (30b), (30c), (300a) , (300
b). (300c), (300d), (300e), (300
f) - Positioning claws (40a, ), (40b), (40c
)--Fixed guide, Fi)--Stage. In each figure, the same reference numerals indicate the same or equivalent parts.

Claims (1)

【特許請求の範囲】[Claims] (1)半導体チップをステージ上で位置決めする半導体
チップ位置決め装置において、複数個のL字型の位置決
め部を有する固定ガイドと、該固定ガイドに対し該固定
ガイドの他方より半導体チップを押圧し当接する複数個
の位置決め爪を有する可動ガイドとを設け、前記複数個
の半導体チップを同時に位置決めするようにした半導体
チップ位置決め装置。
(1) A semiconductor chip positioning device that positions a semiconductor chip on a stage includes a fixed guide having a plurality of L-shaped positioning parts, and a semiconductor chip pressed against the fixed guide by the other fixed guide. 1. A semiconductor chip positioning device, comprising: a movable guide having a plurality of positioning claws; and the semiconductor chip positioning device positions the plurality of semiconductor chips simultaneously.
JP986686A 1986-01-22 1986-01-22 Device for positioning semiconductor chip Pending JPS62169436A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP986686A JPS62169436A (en) 1986-01-22 1986-01-22 Device for positioning semiconductor chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP986686A JPS62169436A (en) 1986-01-22 1986-01-22 Device for positioning semiconductor chip

Publications (1)

Publication Number Publication Date
JPS62169436A true JPS62169436A (en) 1987-07-25

Family

ID=11732061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP986686A Pending JPS62169436A (en) 1986-01-22 1986-01-22 Device for positioning semiconductor chip

Country Status (1)

Country Link
JP (1) JPS62169436A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0547903A (en) * 1991-08-07 1993-02-26 Mitsubishi Denki Eng Kk Positioning equipment for semiconductor device
JP2015159218A (en) * 2014-02-25 2015-09-03 東洋精密工業株式会社 hierarchical work clamp tray
JP2016197654A (en) * 2015-04-03 2016-11-24 東洋精密工業株式会社 Multi-slide type workpiece clamp tray

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0547903A (en) * 1991-08-07 1993-02-26 Mitsubishi Denki Eng Kk Positioning equipment for semiconductor device
JP2015159218A (en) * 2014-02-25 2015-09-03 東洋精密工業株式会社 hierarchical work clamp tray
JP2016197654A (en) * 2015-04-03 2016-11-24 東洋精密工業株式会社 Multi-slide type workpiece clamp tray

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