JPS62168642U - - Google Patents
Info
- Publication number
- JPS62168642U JPS62168642U JP5701486U JP5701486U JPS62168642U JP S62168642 U JPS62168642 U JP S62168642U JP 5701486 U JP5701486 U JP 5701486U JP 5701486 U JP5701486 U JP 5701486U JP S62168642 U JPS62168642 U JP S62168642U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- index row
- pitch
- scale formed
- constituting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length-Measuring Instruments Using Mechanical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5701486U JPH0534106Y2 (cs) | 1986-04-15 | 1986-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5701486U JPH0534106Y2 (cs) | 1986-04-15 | 1986-04-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62168642U true JPS62168642U (cs) | 1987-10-26 |
| JPH0534106Y2 JPH0534106Y2 (cs) | 1993-08-30 |
Family
ID=30886337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5701486U Expired - Lifetime JPH0534106Y2 (cs) | 1986-04-15 | 1986-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0534106Y2 (cs) |
-
1986
- 1986-04-15 JP JP5701486U patent/JPH0534106Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0534106Y2 (cs) | 1993-08-30 |