JPS63110029U - - Google Patents
Info
- Publication number
- JPS63110029U JPS63110029U JP96987U JP96987U JPS63110029U JP S63110029 U JPS63110029 U JP S63110029U JP 96987 U JP96987 U JP 96987U JP 96987 U JP96987 U JP 96987U JP S63110029 U JPS63110029 U JP S63110029U
- Authority
- JP
- Japan
- Prior art keywords
- alignment marker
- linear
- alignment
- predetermined spacing
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP96987U JPS63110029U (cs) | 1987-01-09 | 1987-01-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP96987U JPS63110029U (cs) | 1987-01-09 | 1987-01-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110029U true JPS63110029U (cs) | 1988-07-15 |
Family
ID=30778436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP96987U Pending JPS63110029U (cs) | 1987-01-09 | 1987-01-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110029U (cs) |
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1987
- 1987-01-09 JP JP96987U patent/JPS63110029U/ja active Pending