JPS62168638U - - Google Patents

Info

Publication number
JPS62168638U
JPS62168638U JP5776386U JP5776386U JPS62168638U JP S62168638 U JPS62168638 U JP S62168638U JP 5776386 U JP5776386 U JP 5776386U JP 5776386 U JP5776386 U JP 5776386U JP S62168638 U JPS62168638 U JP S62168638U
Authority
JP
Japan
Prior art keywords
epitaxial growth
growth apparatus
susceptor
cylindrical joint
gas pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5776386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5776386U priority Critical patent/JPS62168638U/ja
Publication of JPS62168638U publication Critical patent/JPS62168638U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP5776386U 1986-04-17 1986-04-17 Pending JPS62168638U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5776386U JPS62168638U (enrdf_load_stackoverflow) 1986-04-17 1986-04-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5776386U JPS62168638U (enrdf_load_stackoverflow) 1986-04-17 1986-04-17

Publications (1)

Publication Number Publication Date
JPS62168638U true JPS62168638U (enrdf_load_stackoverflow) 1987-10-26

Family

ID=30887754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5776386U Pending JPS62168638U (enrdf_load_stackoverflow) 1986-04-17 1986-04-17

Country Status (1)

Country Link
JP (1) JPS62168638U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02156630A (ja) * 1988-12-09 1990-06-15 Nec Corp 気相成長装置
JPH044736U (enrdf_load_stackoverflow) * 1990-04-26 1992-01-16

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02156630A (ja) * 1988-12-09 1990-06-15 Nec Corp 気相成長装置
JPH044736U (enrdf_load_stackoverflow) * 1990-04-26 1992-01-16

Similar Documents

Publication Publication Date Title
JPS62168638U (enrdf_load_stackoverflow)
JPH0338358U (enrdf_load_stackoverflow)
JPH02122431U (enrdf_load_stackoverflow)
JPS6445767U (enrdf_load_stackoverflow)
JPS63101454U (enrdf_load_stackoverflow)
JPS6240497U (enrdf_load_stackoverflow)
JPH01173593U (enrdf_load_stackoverflow)
JPH02131640U (enrdf_load_stackoverflow)
JPH0233270U (enrdf_load_stackoverflow)
JPH02101529U (enrdf_load_stackoverflow)
JPH0195726U (enrdf_load_stackoverflow)
JPS62108516U (enrdf_load_stackoverflow)
JPS6274330U (enrdf_load_stackoverflow)
JPH038426U (enrdf_load_stackoverflow)
JPS63147123U (enrdf_load_stackoverflow)
JPS6312191U (enrdf_load_stackoverflow)
JPH023471U (enrdf_load_stackoverflow)
JPS63134923U (enrdf_load_stackoverflow)
JPS62170627U (enrdf_load_stackoverflow)
JPH01161600U (enrdf_load_stackoverflow)
JPS63157925U (enrdf_load_stackoverflow)
JPS61167393U (enrdf_load_stackoverflow)
JPS6383015U (enrdf_load_stackoverflow)
JPS6228427U (enrdf_load_stackoverflow)
JPS6150761U (enrdf_load_stackoverflow)