JPS6150761U - - Google Patents

Info

Publication number
JPS6150761U
JPS6150761U JP13414884U JP13414884U JPS6150761U JP S6150761 U JPS6150761 U JP S6150761U JP 13414884 U JP13414884 U JP 13414884U JP 13414884 U JP13414884 U JP 13414884U JP S6150761 U JPS6150761 U JP S6150761U
Authority
JP
Japan
Prior art keywords
vapor phase
phase growth
support
processed
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13414884U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13414884U priority Critical patent/JPS6150761U/ja
Publication of JPS6150761U publication Critical patent/JPS6150761U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP13414884U 1984-09-04 1984-09-04 Pending JPS6150761U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13414884U JPS6150761U (enrdf_load_stackoverflow) 1984-09-04 1984-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13414884U JPS6150761U (enrdf_load_stackoverflow) 1984-09-04 1984-09-04

Publications (1)

Publication Number Publication Date
JPS6150761U true JPS6150761U (enrdf_load_stackoverflow) 1986-04-05

Family

ID=30692668

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13414884U Pending JPS6150761U (enrdf_load_stackoverflow) 1984-09-04 1984-09-04

Country Status (1)

Country Link
JP (1) JPS6150761U (enrdf_load_stackoverflow)

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