JPS62168235U - - Google Patents
Info
- Publication number
- JPS62168235U JPS62168235U JP5705786U JP5705786U JPS62168235U JP S62168235 U JPS62168235 U JP S62168235U JP 5705786 U JP5705786 U JP 5705786U JP 5705786 U JP5705786 U JP 5705786U JP S62168235 U JPS62168235 U JP S62168235U
- Authority
- JP
- Japan
- Prior art keywords
- fitting groove
- sealing member
- width
- substrate
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 2
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5705786U JPS62168235U (es) | 1986-04-16 | 1986-04-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5705786U JPS62168235U (es) | 1986-04-16 | 1986-04-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62168235U true JPS62168235U (es) | 1987-10-26 |
Family
ID=30886414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5705786U Pending JPS62168235U (es) | 1986-04-16 | 1986-04-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62168235U (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016502112A (ja) * | 2012-12-26 | 2016-01-21 | ベンタナ メディカル システムズ， インコーポレイテッド | 標本処理システムおよびスライドガラスを保持する方法 |
-
1986
- 1986-04-16 JP JP5705786U patent/JPS62168235U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016502112A (ja) * | 2012-12-26 | 2016-01-21 | ベンタナ メディカル システムズ， インコーポレイテッド | 標本処理システムおよびスライドガラスを保持する方法 |