JPS62166634U - - Google Patents

Info

Publication number
JPS62166634U
JPS62166634U JP5504486U JP5504486U JPS62166634U JP S62166634 U JPS62166634 U JP S62166634U JP 5504486 U JP5504486 U JP 5504486U JP 5504486 U JP5504486 U JP 5504486U JP S62166634 U JPS62166634 U JP S62166634U
Authority
JP
Japan
Prior art keywords
elevating
elevating body
aligner
supported
transmission gear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5504486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0717152Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5504486U priority Critical patent/JPH0717152Y2/ja
Publication of JPS62166634U publication Critical patent/JPS62166634U/ja
Application granted granted Critical
Publication of JPH0717152Y2 publication Critical patent/JPH0717152Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP5504486U 1986-04-11 1986-04-11 半導体用アライナ−におけるウエハ用チャック盤の姿勢修正装置 Expired - Lifetime JPH0717152Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5504486U JPH0717152Y2 (ja) 1986-04-11 1986-04-11 半導体用アライナ−におけるウエハ用チャック盤の姿勢修正装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5504486U JPH0717152Y2 (ja) 1986-04-11 1986-04-11 半導体用アライナ−におけるウエハ用チャック盤の姿勢修正装置

Publications (2)

Publication Number Publication Date
JPS62166634U true JPS62166634U (OSRAM) 1987-10-22
JPH0717152Y2 JPH0717152Y2 (ja) 1995-04-19

Family

ID=30882592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5504486U Expired - Lifetime JPH0717152Y2 (ja) 1986-04-11 1986-04-11 半導体用アライナ−におけるウエハ用チャック盤の姿勢修正装置

Country Status (1)

Country Link
JP (1) JPH0717152Y2 (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007288183A (ja) * 2006-04-12 2007-11-01 Opto Finetech Co Ltd 露光装置およびこれを用いてマスクと基板間の間隙を設定する方法
JP2009164245A (ja) * 2007-12-28 2009-07-23 Sumitomo Heavy Ind Ltd チルトステージ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007288183A (ja) * 2006-04-12 2007-11-01 Opto Finetech Co Ltd 露光装置およびこれを用いてマスクと基板間の間隙を設定する方法
JP2009164245A (ja) * 2007-12-28 2009-07-23 Sumitomo Heavy Ind Ltd チルトステージ

Also Published As

Publication number Publication date
JPH0717152Y2 (ja) 1995-04-19

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