JPS62166505U - - Google Patents

Info

Publication number
JPS62166505U
JPS62166505U JP5205986U JP5205986U JPS62166505U JP S62166505 U JPS62166505 U JP S62166505U JP 5205986 U JP5205986 U JP 5205986U JP 5205986 U JP5205986 U JP 5205986U JP S62166505 U JPS62166505 U JP S62166505U
Authority
JP
Japan
Prior art keywords
optical system
objective lens
position detector
positioning device
eyepiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5205986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5205986U priority Critical patent/JPS62166505U/ja
Publication of JPS62166505U publication Critical patent/JPS62166505U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP5205986U 1986-04-09 1986-04-09 Pending JPS62166505U (US08177716-20120515-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5205986U JPS62166505U (US08177716-20120515-C00003.png) 1986-04-09 1986-04-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5205986U JPS62166505U (US08177716-20120515-C00003.png) 1986-04-09 1986-04-09

Publications (1)

Publication Number Publication Date
JPS62166505U true JPS62166505U (US08177716-20120515-C00003.png) 1987-10-22

Family

ID=30876889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5205986U Pending JPS62166505U (US08177716-20120515-C00003.png) 1986-04-09 1986-04-09

Country Status (1)

Country Link
JP (1) JPS62166505U (US08177716-20120515-C00003.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57167651A (en) * 1981-04-07 1982-10-15 Mitsubishi Electric Corp Inspecting device for surface of semiconductor wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57167651A (en) * 1981-04-07 1982-10-15 Mitsubishi Electric Corp Inspecting device for surface of semiconductor wafer

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