JPS62165507U - - Google Patents
Info
- Publication number
- JPS62165507U JPS62165507U JP3006986U JP3006986U JPS62165507U JP S62165507 U JPS62165507 U JP S62165507U JP 3006986 U JP3006986 U JP 3006986U JP 3006986 U JP3006986 U JP 3006986U JP S62165507 U JPS62165507 U JP S62165507U
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- light
- receives
- photodetector
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3006986U JPS62165507U (OSRAM) | 1986-03-04 | 1986-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3006986U JPS62165507U (OSRAM) | 1986-03-04 | 1986-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62165507U true JPS62165507U (OSRAM) | 1987-10-21 |
Family
ID=30834541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3006986U Pending JPS62165507U (OSRAM) | 1986-03-04 | 1986-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62165507U (OSRAM) |
-
1986
- 1986-03-04 JP JP3006986U patent/JPS62165507U/ja active Pending
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