JPS62164622U - - Google Patents
Info
- Publication number
- JPS62164622U JPS62164622U JP5257986U JP5257986U JPS62164622U JP S62164622 U JPS62164622 U JP S62164622U JP 5257986 U JP5257986 U JP 5257986U JP 5257986 U JP5257986 U JP 5257986U JP S62164622 U JPS62164622 U JP S62164622U
- Authority
- JP
- Japan
- Prior art keywords
- glass substrate
- stamper
- producing
- film
- fine pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 239000010408 film Substances 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims 1
- 238000005323 electroforming Methods 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 2
Landscapes
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5257986U JPS62164622U (sv) | 1986-04-08 | 1986-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5257986U JPS62164622U (sv) | 1986-04-08 | 1986-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62164622U true JPS62164622U (sv) | 1987-10-19 |
Family
ID=30877872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5257986U Pending JPS62164622U (sv) | 1986-04-08 | 1986-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62164622U (sv) |
-
1986
- 1986-04-08 JP JP5257986U patent/JPS62164622U/ja active Pending
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