JPS62163951U - - Google Patents
Info
- Publication number
- JPS62163951U JPS62163951U JP5338886U JP5338886U JPS62163951U JP S62163951 U JPS62163951 U JP S62163951U JP 5338886 U JP5338886 U JP 5338886U JP 5338886 U JP5338886 U JP 5338886U JP S62163951 U JPS62163951 U JP S62163951U
- Authority
- JP
- Japan
- Prior art keywords
- vehicle
- smif pod
- smif
- semiconductor manufacturing
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 11
- 101000873785 Homo sapiens mRNA-decapping enzyme 1A Proteins 0.000 claims description 9
- 102100035856 mRNA-decapping enzyme 1A Human genes 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5338886U JPH0249722Y2 (US07923587-20110412-C00022.png) | 1986-04-09 | 1986-04-09 | |
| US07/018,993 US4826360A (en) | 1986-03-10 | 1987-02-25 | Transfer system in a clean room |
| EP87301888A EP0239266A3 (en) | 1986-03-10 | 1987-03-04 | Transfer system in a clean room |
| CA000531391A CA1271271A (en) | 1986-03-10 | 1987-03-06 | Semiconductor wafer transport system in a clean room |
| KR870002102A KR870009446A (ko) | 1986-03-10 | 1987-03-09 | 크린룸 내의 이송 시스템 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5338886U JPH0249722Y2 (US07923587-20110412-C00022.png) | 1986-04-09 | 1986-04-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62163951U true JPS62163951U (US07923587-20110412-C00022.png) | 1987-10-17 |
| JPH0249722Y2 JPH0249722Y2 (US07923587-20110412-C00022.png) | 1990-12-27 |
Family
ID=30879406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5338886U Expired JPH0249722Y2 (US07923587-20110412-C00022.png) | 1986-03-10 | 1986-04-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249722Y2 (US07923587-20110412-C00022.png) |
-
1986
- 1986-04-09 JP JP5338886U patent/JPH0249722Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0249722Y2 (US07923587-20110412-C00022.png) | 1990-12-27 |
