JPS62163946U - - Google Patents

Info

Publication number
JPS62163946U
JPS62163946U JP5186786U JP5186786U JPS62163946U JP S62163946 U JPS62163946 U JP S62163946U JP 5186786 U JP5186786 U JP 5186786U JP 5186786 U JP5186786 U JP 5186786U JP S62163946 U JPS62163946 U JP S62163946U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
chip
position data
moving
outputs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5186786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5186786U priority Critical patent/JPS62163946U/ja
Publication of JPS62163946U publication Critical patent/JPS62163946U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP5186786U 1986-04-07 1986-04-07 Pending JPS62163946U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5186786U JPS62163946U (enrdf_load_stackoverflow) 1986-04-07 1986-04-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5186786U JPS62163946U (enrdf_load_stackoverflow) 1986-04-07 1986-04-07

Publications (1)

Publication Number Publication Date
JPS62163946U true JPS62163946U (enrdf_load_stackoverflow) 1987-10-17

Family

ID=30876527

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5186786U Pending JPS62163946U (enrdf_load_stackoverflow) 1986-04-07 1986-04-07

Country Status (1)

Country Link
JP (1) JPS62163946U (enrdf_load_stackoverflow)

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