JPS62163933U - - Google Patents
Info
- Publication number
- JPS62163933U JPS62163933U JP5250586U JP5250586U JPS62163933U JP S62163933 U JPS62163933 U JP S62163933U JP 5250586 U JP5250586 U JP 5250586U JP 5250586 U JP5250586 U JP 5250586U JP S62163933 U JPS62163933 U JP S62163933U
- Authority
- JP
- Japan
- Prior art keywords
- lamp
- semiconductor wafer
- heating device
- light source
- source lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5250586U JPS62163933U (nl) | 1986-04-08 | 1986-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5250586U JPS62163933U (nl) | 1986-04-08 | 1986-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62163933U true JPS62163933U (nl) | 1987-10-17 |
Family
ID=30877730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5250586U Pending JPS62163933U (nl) | 1986-04-08 | 1986-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62163933U (nl) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60133719A (ja) * | 1983-12-21 | 1985-07-16 | Seiko Epson Corp | 化合物半導体装置の製造方法 |
| JPS60253939A (ja) * | 1984-05-31 | 1985-12-14 | Fujitsu Ltd | 基板温度の測定方法 |
-
1986
- 1986-04-08 JP JP5250586U patent/JPS62163933U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60133719A (ja) * | 1983-12-21 | 1985-07-16 | Seiko Epson Corp | 化合物半導体装置の製造方法 |
| JPS60253939A (ja) * | 1984-05-31 | 1985-12-14 | Fujitsu Ltd | 基板温度の測定方法 |