JPS62163933U - - Google Patents

Info

Publication number

JPS62163933U

JPS62163933U JP5250586U JP5250586U JPS62163933U JP S62163933 U JPS62163933 U JP S62163933U JP 5250586 U JP5250586 U JP 5250586U JP 5250586 U JP5250586 U JP 5250586U JP S62163933 U JPS62163933 U JP S62163933U

Authority

JP

Japan

Prior art keywords

lamp

semiconductor wafer

heating device

light source

source lamp

Prior art date

1986-04-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010438 heat treatment Methods 0.000 claims 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 230000001678 irradiating effect Effects 0.000 claims 1
• 238000001816 cooling Methods 0.000 description 1
• 230000005855 radiation Effects 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1