JPS62162854U - - Google Patents

Info

Publication number
JPS62162854U
JPS62162854U JP1986050044U JP5004486U JPS62162854U JP S62162854 U JPS62162854 U JP S62162854U JP 1986050044 U JP1986050044 U JP 1986050044U JP 5004486 U JP5004486 U JP 5004486U JP S62162854 U JPS62162854 U JP S62162854U
Authority
JP
Japan
Prior art keywords
diaphragm
semiconductor
pressure sensor
type gauge
stress generated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986050044U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986050044U priority Critical patent/JPS62162854U/ja
Publication of JPS62162854U publication Critical patent/JPS62162854U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP1986050044U 1986-04-03 1986-04-03 Pending JPS62162854U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986050044U JPS62162854U (enExample) 1986-04-03 1986-04-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986050044U JPS62162854U (enExample) 1986-04-03 1986-04-03

Publications (1)

Publication Number Publication Date
JPS62162854U true JPS62162854U (enExample) 1987-10-16

Family

ID=30873036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986050044U Pending JPS62162854U (enExample) 1986-04-03 1986-04-03

Country Status (1)

Country Link
JP (1) JPS62162854U (enExample)

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