JPS62131453U - - Google Patents
Info
- Publication number
- JPS62131453U JPS62131453U JP1986016824U JP1682486U JPS62131453U JP S62131453 U JPS62131453 U JP S62131453U JP 1986016824 U JP1986016824 U JP 1986016824U JP 1682486 U JP1682486 U JP 1682486U JP S62131453 U JPS62131453 U JP S62131453U
- Authority
- JP
- Japan
- Prior art keywords
- pedestal
- silicon
- pressure sensor
- fixed
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H10W72/884—
Landscapes
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986016824U JPS62131453U (enExample) | 1986-02-10 | 1986-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986016824U JPS62131453U (enExample) | 1986-02-10 | 1986-02-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62131453U true JPS62131453U (enExample) | 1987-08-19 |
Family
ID=30809026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986016824U Pending JPS62131453U (enExample) | 1986-02-10 | 1986-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62131453U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000506261A (ja) * | 1996-02-27 | 2000-05-23 | ニフォテク・アーエス | 圧力センサ |
| JP2007253323A (ja) * | 2006-03-24 | 2007-10-04 | Infineon Technologies Sensonor As | Ｍｅｍｓ構造用の一体化した台座マウント |
-
1986
- 1986-02-10 JP JP1986016824U patent/JPS62131453U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000506261A (ja) * | 1996-02-27 | 2000-05-23 | ニフォテク・アーエス | 圧力センサ |
| JP2007253323A (ja) * | 2006-03-24 | 2007-10-04 | Infineon Technologies Sensonor As | Ｍｅｍｓ構造用の一体化した台座マウント |