JPS62162257U - - Google Patents
Info
- Publication number
- JPS62162257U JPS62162257U JP4840286U JP4840286U JPS62162257U JP S62162257 U JPS62162257 U JP S62162257U JP 4840286 U JP4840286 U JP 4840286U JP 4840286 U JP4840286 U JP 4840286U JP S62162257 U JPS62162257 U JP S62162257U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- vacuum chamber
- feed screw
- screw shaft
- cart
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4840286U JPS62162257U (enExample) | 1986-03-31 | 1986-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4840286U JPS62162257U (enExample) | 1986-03-31 | 1986-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62162257U true JPS62162257U (enExample) | 1987-10-15 |
Family
ID=30869895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4840286U Pending JPS62162257U (enExample) | 1986-03-31 | 1986-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62162257U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0556953U (ja) * | 1992-01-17 | 1993-07-30 | 日新電機株式会社 | 基板処理装置 |
-
1986
- 1986-03-31 JP JP4840286U patent/JPS62162257U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0556953U (ja) * | 1992-01-17 | 1993-07-30 | 日新電機株式会社 | 基板処理装置 |