JPS62162256U - - Google Patents
Info
- Publication number
- JPS62162256U JPS62162256U JP4840186U JP4840186U JPS62162256U JP S62162256 U JPS62162256 U JP S62162256U JP 4840186 U JP4840186 U JP 4840186U JP 4840186 U JP4840186 U JP 4840186U JP S62162256 U JPS62162256 U JP S62162256U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- film
- vacuum
- cart
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4840186U JPS62162256U (enExample) | 1986-03-31 | 1986-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4840186U JPS62162256U (enExample) | 1986-03-31 | 1986-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62162256U true JPS62162256U (enExample) | 1987-10-15 |
Family
ID=30869893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4840186U Pending JPS62162256U (enExample) | 1986-03-31 | 1986-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62162256U (enExample) |
-
1986
- 1986-03-31 JP JP4840186U patent/JPS62162256U/ja active Pending