JPS6215758U - - Google Patents
Info
- Publication number
- JPS6215758U JPS6215758U JP10679585U JP10679585U JPS6215758U JP S6215758 U JPS6215758 U JP S6215758U JP 10679585 U JP10679585 U JP 10679585U JP 10679585 U JP10679585 U JP 10679585U JP S6215758 U JPS6215758 U JP S6215758U
- Authority
- JP
- Japan
- Prior art keywords
- hollow
- hollow part
- plasma
- gas
- cathode discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 4
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10679585U JPH0145067Y2 (id) | 1985-07-12 | 1985-07-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10679585U JPH0145067Y2 (id) | 1985-07-12 | 1985-07-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6215758U true JPS6215758U (id) | 1987-01-30 |
| JPH0145067Y2 JPH0145067Y2 (id) | 1989-12-26 |
Family
ID=30982484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10679585U Expired JPH0145067Y2 (id) | 1985-07-12 | 1985-07-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0145067Y2 (id) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007095536A (ja) * | 2005-09-29 | 2007-04-12 | Univ Nagoya | ラジカル発生装置 |
-
1985
- 1985-07-12 JP JP10679585U patent/JPH0145067Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007095536A (ja) * | 2005-09-29 | 2007-04-12 | Univ Nagoya | ラジカル発生装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0145067Y2 (id) | 1989-12-26 |
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