JPS62157194A - Elevator - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] "Industrial Application Field" The present invention relates to an elevating device suitable for use in clean rooms, etc., and in particular, it is capable of moving a movable body in a non-contact state, and is capable of preventing wear and damage of sliding parts. This article relates to a lifting device that can prevent contamination due to the scattering of lubricating oil.

``Conventional technology'' In semiconductor industry or biotechnology factories and laboratories, it is necessary to improve indoor cleanliness.
It is desired that the work be mechanized to prevent contamination by human bodies, and that the machines used in such places be TW-clean so that they do not become a source of contamination.

Figure 8 shows an example of an elevating device conventionally employed in conveyance devices and the like for such purposes. By moving the annular moving body C disposed on the outside of the cylinder a up and down using hydraulic pressure and hydraulic pressure, the annular moving body C disposed outside the cylinder a is driven by the driving body by magnetic force.
It is Party B who transports the goods.

In this lifting device, air or air is supplied from supply pipes d and d'' connected to the upper and lower ends of cylinder a to move the driving body up and down in the axial direction of cylinder a, or to hold it in that position. That's what I do.

The driving body C is equipped with a plurality of magnets e... and a yoke f magnetized by the magnets e..., and the movable body C is equipped with magnets e... and a yoke f of the driving body C. . . , and a yoke h . . . are provided. The movable body C is suspended by the driving body due to the attractive force of the magnets e...1g, and as the driving body moves within the cylinder a, it begins to follow the driving body. ing. In this conventional lifting device, the movable body C is configured to slide on the outer surface of the cylinder a, so lubricating oil is used to enable the movable body C to slide smoothly.

"Problems to be Solved by the Invention" By the way, in the elevating device configured such that the moving body C slides on the outer surface of the cylinder a as described above, no matter how much lubrication pool is used, the sliding part Wear cannot be completely prevented. If the abrasion powder generated by the wear is scattered around, the lubricating oil itself will also be scattered, and it is inevitable that the surroundings of the device will be contaminated by this powder.

Therefore, if such a lifting device is installed in a room that requires extremely high lH cleanliness, such as a clean room, the wear particles and lubricating oil will create a layer that reduces the cleanliness of the room. Therefore, the second step is to install the device 11 directly in such a room:
There must be something that doesn't come.

In addition, mechanisms without sliding parts, such as magnetic levitation devices or devices that form an air layer between objects, are used, but these devices absorb the load of a moving object using magnetic force or wind pressure. This method moves objects in a state where there is no friction between objects, and while it is suitable for horizontal movement, it has been difficult to apply it to lifting devices that move vertically.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an elevating device that does not scatter abrasion powder or lubrication pools to the surroundings and can be used even in clean rooms and the like.

``Means for Solving the Problems'' The present invention includes a cylindrical body erected on a base, a drive body disposed inside the cylindrical body and moved in the axial direction of the cylindrical body by a drive source, and a moving body disposed on the outside of the body with a gap between the outer surface of the cylindrical body and the outer surface of the cylindrical body; The above problem is solved by providing a pair of first magnets that are driven and a pair of second magnets that secure the gap between the moving body and the cylindrical body by repelling or attracting each other. That's what I do.

"Function" In the elevating device of the present invention, when the moving body is suspended by the driving body with the movable body spaced apart across the wall of the cylindrical body due to the attractive force of the first magnet of the pair, the driving body The movable body is also driven by the drive body as it moves up and down by the drive source. In addition, the gap between the movable body and the outer surface of the cylindrical body is maintained by the repulsion or attraction force of the second magnet of the pair, and the size and distribution of the static load or dynamic load applied to the movable body when it is stationary or when moving. Even when the moving body changes, the cylindrical body and the movable body are always kept in a non-contact state by adjusting the repulsive force and attractive force of the second magnet.

[Embodiment J] Hereinafter, an embodiment in which the lifting device of the present invention is applied to a conveying device in a clean room will be described with reference to FIGS. 1 to 7.

This conveyance device consists of storage shelves 1 erected on both sides of the rail R.
7, which runs on the rail R; a platform B; an elevating device A according to the present invention provided on the base B; and a frame F that is raised and lowered by the elevating device A. It consists of a slide, a door arm S, etc., which is installed on this frame so as to be movable in a direction perpendicular to the rail R, and suspends the article G at its tip, and can be operated remotely by a human or by a computer. It is automatically operated by a program and can move in three axial directions, and each sliding part has a non-contact structure.

First, the configuration of the lifting device A will be explained. In these figures, reference numeral 1 denotes a cylinder (cylindrical body), and this cylinder 1.1 is made of a non-magnetic material and has a circular cross section, and is disposed at the front and rear ends of the base B in the running direction.

This cylinder 1 has a seal plate 2 arranged at its lower end,
A motor casing 3.3 is placed on its upper end, which forms a structure in which the inside of the motor casing 3.3 is sealed from the outside.

Motors 4.4 that rotate synchronously are disposed within the motor casings 3, 3, respectively, and a ball screw mechanism 5 is connected to a rotating shaft 4a of the motor 4 by a joint 6. This ball screw mechanism 5 includes a feed screw 5a which is supported at both ends by bearings 7.7 and is rotatably arranged around the inner sleeve of the cylinder 1, and a nut screwed into the feed screw 5a. It consists of 5b,
When the feed screw 5a is rotated by the motor 4, the nut 5b is moved in the axial direction (vertical direction) of the cylinder I. A driving body 8 is attached to the nut 5b of this ball screw mechanism 5, and this driving body 8 consists of a first magnet 9 and two second magnets arranged above and below it.
It consists of a magnet 10.10. These first and second magnets 9, 10, 10 are each formed in an annular shape,
The inner peripheral surface is fixed in contact with the outer peripheral surface of the above-mentioned oak 5b with a predetermined distance maintained by spacers 11.11, and the outer peripheral surface of each magnet 9, 10.10 can slide on the inner surface of the cylinder 1. It's like that. The first magnet 9, as shown in detail in FIG. 5, consists of two permanent magnets 9a, 9a and three yokes 9b placed between them. 9b... are N pole, S pole, and S pole by permanent magnets 9a and 9a, respectively.
It is magnetized to the north pole. Further, the second magnet 10.1
0 consists of a permanent magnet lOa... and a yoke IOb sandwiching them, and these yokes IOb... are magnetized to N pole, S pole, and N pole, respectively. Note that between the moving body 8 and the cylinder l, there are yokes 9b...
R 8 a. formed vertically on the outer peripheral surface of 10b.
... and a protrusion 1a formed on the inner surface of the cylinder I so that the groove 8aL=[i%
is provided.

On the other hand, on the outside of the cylinder 1.1 there is a moving body 12. ! 2 are arranged. This moving body 12 has the above-mentioned frame F.
This frame F is formed into a mouth shape when viewed from above from long sides 2+, 2+ along the longitudinal direction of the base B and short sides 22 and 22 connecting both ends thereof. , is connected to the movable body 12 by a connecting portion 23 protruding from the center of this short side 22°22. In addition, this frame F is light 1 and sturdy (1 is the construction, and its +
The four materials are selected so as not to affect the moving body 12 and the like due to magnetism. This moving body 12 includes a tubular body 13
A first magnet 14, each of which has an annular inner diameter slightly larger than the outer diameter of the cylinder l, and two second magnets 15 and 15 are attached to the inside of the cylinder l with a predetermined distance maintained between them by a spacer 16. 8 This first part has a
The m-stone 14 is annular like the first magnet 9 in the drive body 8, and the permanent magnets 14a, 14a cause the yoke +4b
... are made to be the south pole, north pole, and south pole. Further, the second magnet 15.15 has a configuration in which a permanent magnet and an electromagnet are combined. That is, as shown in detail in FIGS. 5 to 7, the second magnets 15.15 are connected to a plurality of (eight in this embodiment) yokes 15a that protrude inside the tubular body 13 and are attached radially. . . . and permanent magnets +sb . . . fixed to the upper and lower tips of the yoke 15a . It is composed of a coil 15c. The yoke 15a... is a permanent magnet 15b.
. . . and coil 15c . . . so that their tips become N Ir"M, S pole, and N tJi, respectively, and coil ! 5c . . . can control their magnetic force. Also, this [hyperactive body I2
There are two gap sensors I 7 17 at the upper and lower inner sides of the second magnet 1s and +s positions, respectively.
h#V:) It's been cut short. These gap sensors I7. +7, their central angle is 90 in plan view
(See Figure 6). A control device (not shown) is provided to keep the gap constant by controlling the value of the current flowing through the coils 15c based on the detected value of the gap sensor +7.17. The mobile body I2 configured as described above has the first
, the second magnet 14, 15.15 is connected to the first magnet of the driving body 8.
, are arranged to face the second magnets 9 and 10° IO with 7 cylinders 1 in between. As is clear from the polarity shown in FIG. 5, the magnets provided on the drive body 8 and the movable body 12 are such that the first magnets 9 and 14 are attracted to each other, and the second magnets are attracted to each other. The magnets 10°15 are arranged to repel each other.

Next, the configuration of other parts of the transport device will be described. A support member 26 consisting of a pair of vertical portions 24.24 and a horizontal portion 25 connecting the upper ends thereof is erected on the upper surface of the long sides 2+, 2+ of the frame F, and the horizontal portions on each long side 21.21 are erected. A guide member 27 is installed between 25 and 25. A kite rail 28 having an inverted T-shaped cross section is formed on the lower surface of the guide member 27.
A slide arm 29 having a shape to fit with the guide rail 28 is attached to the upper surface of the slide arm S so as to be movable in a direction orthogonal to the rail R. This kite member 2
7 and the slide arm S, magnets (
(not shown) is attached, and a magnetic levitation system is used to prevent contact between the two using its attractive force. and,
A gap sensor (not shown) is provided to detect the gap between the guide rail 28 and '7R29, and the attraction force of the magnet is adjusted based on the value thereof.Furthermore, a drive source for moving the slide arm S is provided. A well-known linear motor (not shown) is used. On the lower surface of the left and right ends of the slide arm S, there is an electromagnet 31 that detachably attracts the magnetic piece 30 attached to the upper surface of the stored article G.
or has been set up.

The rail R has upper and lower horizontal parts 3 as shown in FIG.
2.33 and the vertical portion 34 form an I-shaped cross section, and on the other hand, a groove 35 shaped to fit the rail R is formed on the lower surface of the base B. Electromagnets 36, 36 and 37, 37 are arranged at the lower bottom and side parts of this groove 35, respectively, to support the load of the base B or control its posture by attracting the upper horizontal part 32 of the rail H. The suction force is adjusted based on the detected value of a gap sensor (not shown) to prevent contact between the two. Further, a coil 38 is disposed at the upper bottom of the groove 35, which causes the upper horizontal portion 32 of the rail R to have a vortex. The linear motor LM is configured to generate a magnetic field and move the two relative to each other.
or has been set up.

Consisting of the rail R1 base B, lifting device A, and slide arm S as described above (configuration B), this conveying device is capable of loading and unloading articles G into and out of the storage shelf ■7 with no sliding contact parts. It's a cheap item.

With this conveyance device, for example, to take out an article G from a storage shelf, the slide arm S is shortened and the base B is moved up to the required height of 11 yen, and then the lifting device A is activated to raise the height. After further extending the slide arm S and positioning the electromagnet 3■ slightly above the magnetic piece 3o, operate the lifting device A again to lower the frame F a little, and then move the electromagnet 3
Bring I into close contact with the magnetic piece 30 and start the electromagnet 3■. Then, the above process is performed in reverse to shorten the slide arm S, the base B is moved to a required position, and the same process is performed to lower the article G, thereby completing the operation.

During such a work process, in the lifting device A, the two motors 4 and 11 rotate synchronously, so the drive body 8,
8, and a moving body 12. +2 and always have the same height, so the parallelism of the frame F is maintained.

Furthermore, since the first magnets 9 and 14 attract each other, when the drive body 8 moves within the cylinder I by the pole screw mechanism 5, the movable body 12 moves following the drive body 8 due to the attraction force. However, since the second magnets 10, 15 repel each other, the movable body 12 is urged radially outward of the cylinder l. As a result, the moving body 12 and cylinder I
That's right! Are the axes of t and others aligned and between the movable body 12 and the outer surface of the 7th ring? In this case, uniform gaps 18 at predetermined intervals are always maintained over the entire circumferential direction of the cylinder 1.

If the size or distribution of the load changes due to the movement of the slide arm S or the loading and unloading of the articles G, or if the dimensions of the gap 18 change due to external force being applied to the moving body I2, etc. , the second magnet 15.1 of the movable body 12 detects its fluctuation by the gap sensor 17.17, and controls the current value of a predetermined coil 15c by the control device (path shown) based on the detection result.
The magnetic force or repulsive force of 5 is controlled, so that the dimension of the gap 18 is always kept at a constant value.

In addition, in this example, control is performed for five degrees of freedom excluding the vertical position of the frame F.
By synchronizing the top and bottom of the moving body 12.12, rotation in the vertical plane defined by the central axes of the two cylinders 1.1 (rotation around the X axis shown in Figure 1) can also be restrained. I can do it. Therefore, the above control only needs to be performed for the remaining four degrees of freedom.

By the way, in the conveyance device like this example, the largest one among the sliding rotation moments acting on the frame F is the expansion and contraction of the slide arm S and the movement of the article G at the tip of the slide arm S.
This is thought to be the moment around the axis that acts when attaching and detaching. In this case, if the slide arm S is not extended and contracted at the same time as the frame F moves up and down, even if cylinder 1 and moving body I2 come into contact, both will slide and 1♀ will not be worn out. In order to prevent this, it is conceivable to provide a clamp mechanism or the like that mechanically fixes the movable body I2 to the cylinder l only during the above process. In that case, a control method is adopted in which the clamp is released gradually to prevent changes in the posture.

In this example, two pairs of clamps 1 and movable bodies 12 are provided, but by arranging the other pair at appropriate positions, it is possible to increase the rotation around the X-axis when transporting large articles G as described above. In addition to being able to cope with changes in the rotational moment of the
The number of ... can be reduced, and control becomes simpler.

As mentioned above, in this elevating device A, the movable body 12
Since there are no sliding parts that are always in a non-contact state with the cylinder 1, there is no wear and therefore no lubricating oil is required. Therefore, unlike conventional lifting devices, wear particles and lubricant wells do not scatter and contaminate the surrounding area, and can be installed in high-cleanliness rooms such as clean rooms, which were previously impossible to install. It becomes possible.

Note that inside the clamp I, the feed screw 5a and the nut 5b, as well as the inner surface of the clamp I and the outer peripheral surface of the driver 8, are in contact with each other, so there is a risk that they will wear out, and However, since the inside of cylinder 1 is sealed,
There is wear powder on the outside of cylinder 1! 1g Nameura will not scatter.

l;II I--,-(n
丙l += っ +、I Y m DB 1
．． f-Blank The lifting device of the present invention is, of course, not limited to use in the above-mentioned conveying device, but may be used in general lifting devices. Further, the number of cylinders is not limited to two, and may be one or three or more, and the configurations of the magnets of the driving body and the moving body, their polarities, etc. are not limited to the above and may be changed as appropriate. For example, in the above description, the first magnet is composed of a permanent magnet and a yoke, but it may be composed of a combination of a permanent magnet and an electromagnet, similar to the second magnet described above. Further, the second magnet does not necessarily have to be a combination of a permanent magnet and an electromagnet, and may be composed only of an electromagnet. Furthermore, although the second magnets were described above as repelling each other, the same gap can be secured even if the second magnets attract each other. In this case, the second
One of the magnets (the one on the driving body side and the one on the moving body side) can be magnetized instead of being a magnet (for example, a piece of iron may be used).

Further, the shape of the cylinder is not limited to a circular cross section, but may be, for example, a rectangular cross section. In that case, the shape of the driving body and the movable body may be made to correspond to the shape of the clamp. In addition, although a ball screw mechanism is used as the drive source for the drive body in the above example, the drive source is not limited to this, and any suitable means may be used, such as driving with a wire or chain, driving using hydraulic pressure or pneumatic pressure. You can do it too.

In addition, although a magnetic levitation system and a linear motor were used in the above example as the horizontal movement and load support mechanism (1ξ) in the conveyance device, a levitation or movement mechanism using compressed air may be used, for example.

"Effects of the Invention" As explained in detail above, the elevating device of the present invention includes a cylindrical body erected on a base, and a cylindrical body disposed within the cylindrical body that is moved in the axial direction of the cylindrical body by a drive source. a driving body; and a moving body disposed on the outside of the cylindrical body with a gap between the outer surface of the segment body, and the driving body and the moving body,
A pair of first magnets are provided which cause the movable body to follow the drive body by attracting each other, and a pair of first magnets which secure the gap between the movable body and the cylindrical body by repelling or attracting each other. Since the second magnet is provided, the movable body can move up and down while maintaining a non-contact state, which not only prevents wear particles from scattering like in conventional lifting devices, but also eliminates the need for lubricating oil. There is no need to use it, so the lubricating oil will not be scattered. Therefore, this lifting device has no risk of contaminating the surrounding area, and therefore can be installed in highly clean rooms such as clean rooms, which could not be installed in the past, making clean rooms labor-saving. This has the effect of making it possible to further improve cleanliness.

[Brief explanation of drawings]

1 to 7 are views showing an embodiment of the present invention, in which FIG. 1 is a perspective view showing the entire conveying device equipped with a lifting device of this embodiment, and FIG. 2 is a front sectional view thereof; Figure 3 is a side sectional view, Figure 4 is a plan sectional view, Figure 5 is an enlarged view of the main part of Figure 2, Figure 6 is a view taken along the ■-■ arrow in Figure 5, and Figure 7 is a cross-sectional view.
The figure is also a ■-■ arrow view. Moreover, FIG. 8 is a sectional view showing an example of a conventional lifting device. A... Lifting device, B... Base, 1...
... cylinder (cylindrical body), 5 ... ball screw mechanism (drive source), 8 ...
...Driver, 9.14...First magnet, 10.15...Second magnet, 12...Moving body, 18...Gap .

Claims (2)

[Claims] (1) a cylindrical body erected on a base; a driving body disposed within the cylindrical body and moved in the axial direction of the cylindrical body by a drive source;
a movable body disposed on the outside of the cylindrical body with a gap between the cylindrical body and the outer surface of the cylindrical body; A pair of first magnets are provided to be driven by the driving body, and a pair of second magnets are provided that secure the gap between the moving body and the cylindrical body by repelling or attracting each other. A lifting device characterized by: (2) The lifting device according to claim 1, wherein at least a portion of the second magnet is an electromagnet.