JPS62157130A - Adsorption conveyance device for ic handler - Google Patents

Abstract

PURPOSE:To enable stabilization of and regulate a conveyance speed and to permit execution of an intermediate stop, by a method wherein, through forward and reverse rotation, the stop, and control of the rotation speed of each of two motors, a vacuum pad performs vertical movement, reciprocation in the direction of a shaft Y, an intermediate stop, and the change of a conveyance speed. CONSTITUTION:Making a motor 13 run forward and reverse, vacuum adsorption pads 5, aligned to a leverform member 4, are vertically moved, and with the motor 13 stopped, each of the vacuum adsorption pads 5 is stopped to an arbitrary position. Making the motor 13 run at an equal speed, the vacuum adsorption pads 5 are vertically moved at an equal speed. Making a motor 17 run forward and reverse, a timing belt 19 is rotated forward and reversed, a timing belt 19 is rotated forward and reversed, the vacuum adsorption pads 5 are reciprocated in the direction of an axis Y through a rack and pinion mechanism 11, and making the motor 17 stop, driving in the direction of the axis Y is promptly stopped. Control of the rotation speeds of the motors 13 and 17 enables arbitrary regulation of the vacuum adsorption pads 5.

Description

[Detailed Description of the Invention] [Industrial Field of Application] The present invention is incorporated into an IC handler to handle multiple ICs.
This relates to a device that vacuum suctions and transports.

[Prior art]

The IC handler sequentially transports a large number of ICs, attaches them to a measurement socket, tests their electrical performance, and classifies the ICs removed from the measurement socket into classes according to the test results and carries them out. It is an automatic device.

A chute rail 2 as shown in FIG. 2 is mainly used to transport the IC within the IC handler. 1 is 25 in RC during transportation.

Furthermore, when ICs are supplied to the IC handler or transported from the IC handler, they are arranged and placed on a pallet 3-2 as shown in FIG.

For this reason, in the IC handshield, a suction conveyance device is used to transfer the ICs on the pallet 3 onto the chute rail 2, or vice versa.

In order to perform the above-mentioned reloading work with great efficiency, a rod-shaped member is constructed with vacuum suction pads arranged, two horizontal orthogonal axes X, Y, and a vertical axis Z are set, and the rod-shaped member is aligned with the X axis. There is a suction conveyance device in the public domain that has a structure in which the suction conveyance device is supported in the direction, and is provided with means for moving the suction device in parallel in the Z-axis direction and means for moving it in parallel in the Y-axis direction.

FIG. 4 shows a known example of a suction 41 conveying device having the above structure,
, y, and z are orthogonal trigons.

A rod-shaped member 4 is arranged in the X-axis direction, and a large number of vacuum suction pads 5 are arranged in a row in the X-axis direction.

On the other hand, a horizontal guide shaft 6 is provided in the Y-axis direction, and guides the parallel movement of the slide block 7 in the Y-axis direction, and is driven reciprocally in the Y-axis direction by an air cylinder 8.

The rod-shaped member 4 is guided in parallel movement in the Z-axis direction with respect to the slide block 7 by a vertical guide shaft 9, and is driven reciprocatingly in the Z-axis direction by an air cylinder 10.

[Problem that the invention seeks to solve]

According to the above conventional device (Fig. 4), the vacuum suction pad 5
The same number of ICs are suctioned and held in the Z-axis direction.

By reciprocating alternately in the Y-axis direction, a large number of ICs can be simultaneously transferred and reloaded in each operation cycle.

However, in this conventional device (Fig. 4), the Z-axis direction,
The operating stroke in the Y-axis direction is constant and cannot be stopped in the middle. Moreover, it is not easy to adjust the conveyance speed, and furthermore, the conveyance speed fluctuates due to fluctuations in air pressure and is unstable.

The present invention has been made in view of the above-mentioned circumstances, and its purpose is to provide an improved vacuum system that allows easy adjustment of conveyance speed, stable conveyance speed, and allows for flexible intermediate stop operations. The present invention aims to provide a suction type conveyance device.

[F-stage to solve problems]

The vacuum suction conveyance device of the present invention created to achieve the above object comprises a pair of rack and pinion mechanisms, the pinion gears of which are provided with spline holes, and two spline shafts are rotatable. While supporting in the Y-axis direction;
An electric motor and a transmission means are provided to synchronize and drive the two spline shafts to rotate, and the two spline shafts are fitted into the spline holes of the pinion gear to guide the parallel movement of the rack and pinion mechanism in the Y-axis direction. and a pinion gear, the rod-shaped member is supported in the X-axis direction by a pair of racks of the mechanism, and further,
As mentioned above, the parallel movement in the Y-axis direction is guided by the spline shaft; means for reciprocating the rack and pinion mechanism in the Y-axis direction; The hanging transmission means is driven by an electric motor, and one part of the hanging transmission member is attached to the rack and pinion mechanism.

[Effect]

According to the above configuration, by controlling the operation of the electric motor that is the prime mover of the drive means, it is possible to stabilize and adjust the conveyance speed, and to stop the conveyance speed in the middle.

〔Example〕

FIG. 1 shows one embodiment of the invention.

A pair of rack and pinion mechanisms 11 are provided. lla is a rack, and llb is a pinion gear.

The above pinion gear llb has a spline hole 11. .

This is provided.

12, 12 is a pair of spline shafts with bearings (not shown)
The motor 1 is rotatably supported in the Y-axis direction by
3. The transmission shaft 14 and the worm gear group 15 are driven to rotate synchronously in opposite directions at a constant speed.

The pair of spline shafts 12 are respectively fitted into spline holes 1lb- of pinion gear llb, and drive the pair of racks lla up and down synchronously via pinion gear llb.

The pair of racks 1la-: both ends of a rod-like member 4' are fixed to the lower end of each rack, and the rod-like member 4' is supported in the X-axis direction.

The illustrated reference numeral 16 denotes a drive boot, which is attached to the rotating shaft of the motor 17. 18 is an idler pulley. A belt (timing belt in this example) 19 is wound between both pulleys 16.1B and stretched in the Y-axis direction, and one point A of the belt is hooked to the bracket 11 of the rack and pinion mechanism. One location A is one location in a macro sense, and includes, for example, mounting with a plurality of glue beds.

When carrying out the present invention, it is also possible to use sprockets in place of the boots U16 and U18, and a chain in place of the timing belt 19.
1° ear can be used instead of 9.

In the conveyance device configured as described above, the motor 13
The rod-shaped member 4' is rotated forward or reverse depending on the rotation speed.
The vacuum suction pads 5 arranged in the vacuum suction pads 5 are moved up and down, and when the motor 13 is stopped, the vacuum suction pads 5 are stopped at an arbitrary position. When the motor 13 is rotated at a constant speed, the vacuum suction pad 5 moves upward and downward at a constant speed.

Further, when the motor 17 is rotated forward or reverse, the timing belt 19 is rotated forward or reverse, and the vacuum suction pad 5 is reciprocated in the Y-axis direction via the rack and pinion mechanism 11. When the motor 17 is stopped, the drive in the Y-axis direction is immediately stopped.

By controlling the rotational speed of the motors 13 and 17, the moving speed of the vacuum suction pad 5 can be adjusted as desired.

〔Effect of the invention〕

As described in detail above, when the present invention is applied, it is possible to easily adjust the conveyance speed of the vacuum suction conveyance device, and moreover, it is possible to make an intermediate stop at any point, which is an excellent practical effect. It greatly contributes to improving the performance of the handler.

[Brief explanation of drawings]

Figure 1 is a perspective view showing one practical example of the present invention, and Figure 2 is an rc
FIG. 3 is a perspective view of an IC bullet, and FIG. 4 is an explanatory diagram of a conventional vacuum suction conveyance device. DESCRIPTION OF SYMBOLS 1...IC, 2...Chute rail, 3...Pallet, 4.4'...rod-shaped member, 5...vacuum suction pad, 11...rack and pinion mechanism, lla.・・・
Rack, llb...pinion gear, 11. ,... Spline hole, 11C... Bracket, 12... Spline shaft, 13.17... Motor, 19... Timing belt.

Claims (1)

[Claims] A rod-shaped member is constructed in which vacuum suction pads are arranged, two horizontal orthogonal axes X, Y, and a vertical axis Z are set, and the rod-shaped member is supported in the X-axis direction and parallel to the Z-axis direction. In the suction conveyance device for an IC handler, which is provided with a means for moving and a means for moving parallel in the Y-axis direction, a pair of rack and pinion mechanisms are configured, a spline hole is provided in the pinion gear of the mechanism, and An electric motor and a transmission means are provided to rotatably support the spline shafts of the book in the Y-axis direction and to drive the two spline shafts to rotate in synchronization, and the two spline shafts are fitted into the spline holes of the pinion gear. The rod-shaped member is supported in the X-axis direction by a pair of racks of the mechanism, and further, A means is provided for reciprocating a rack and pinion mechanism in the Y-axis direction, whose parallel movement in the Y-axis direction is guided by a spline shaft.
An IC handler suction device characterized in that the axial drive means drives a winding transmission means stretched in the Y-axis direction by an electric motor, and one part of the winding transmission member is attached to a rack and pinion mechanism. Conveyance device.