JPS62156860U - - Google Patents
Info
- Publication number
- JPS62156860U JPS62156860U JP4468086U JP4468086U JPS62156860U JP S62156860 U JPS62156860 U JP S62156860U JP 4468086 U JP4468086 U JP 4468086U JP 4468086 U JP4468086 U JP 4468086U JP S62156860 U JPS62156860 U JP S62156860U
- Authority
- JP
- Japan
- Prior art keywords
- detergent
- light
- receiving element
- inspection device
- emitted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4468086U JPS62156860U (enrdf_load_stackoverflow) | 1986-03-26 | 1986-03-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4468086U JPS62156860U (enrdf_load_stackoverflow) | 1986-03-26 | 1986-03-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62156860U true JPS62156860U (enrdf_load_stackoverflow) | 1987-10-05 |
Family
ID=30862718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4468086U Pending JPS62156860U (enrdf_load_stackoverflow) | 1986-03-26 | 1986-03-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62156860U (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9316919B2 (en) | 2003-08-29 | 2016-04-19 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5245956A (en) * | 1975-10-09 | 1977-04-12 | Kurabo Ind Ltd | Method and system for measuring distribution of substance sticked to s urface of string |
| JPS5511866A (en) * | 1978-07-13 | 1980-01-28 | Nippon Ester Co Ltd | Molten polymer sending-out method |
-
1986
- 1986-03-26 JP JP4468086U patent/JPS62156860U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5245956A (en) * | 1975-10-09 | 1977-04-12 | Kurabo Ind Ltd | Method and system for measuring distribution of substance sticked to s urface of string |
| JPS5511866A (en) * | 1978-07-13 | 1980-01-28 | Nippon Ester Co Ltd | Molten polymer sending-out method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9316919B2 (en) | 2003-08-29 | 2016-04-19 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US9568841B2 (en) | 2003-08-29 | 2017-02-14 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |