JPS6215566U - - Google Patents

Info

Publication number

JPS6215566U

JPS6215566U JP10715985U JP10715985U JPS6215566U JP S6215566 U JPS6215566 U JP S6215566U JP 10715985 U JP10715985 U JP 10715985U JP 10715985 U JP10715985 U JP 10715985U JP S6215566 U JPS6215566 U JP S6215566U

Authority

JP

Japan

Prior art keywords

wafer

ion beam

thin film

film forming

ion

Prior art date

1985-07-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010409 thin film Substances 0.000 claims description 5
• 230000008020 evaporation Effects 0.000 claims description 3
• 238000001704 evaporation Methods 0.000 claims description 3
• 238000010884 ion-beam technique Methods 0.000 claims description 3
• 239000000463 material Substances 0.000 claims 1
• 238000001771 vacuum deposition Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 5
• 238000007740 vapor deposition Methods 0.000 description 3
• 239000000126 substance Substances 0.000 description 1

Cited By (2)