JPS62154315A - Magnetic head - Google Patents

Magnetic head

Info

Publication number
JPS62154315A
JPS62154315A JP29805185A JP29805185A JPS62154315A JP S62154315 A JPS62154315 A JP S62154315A JP 29805185 A JP29805185 A JP 29805185A JP 29805185 A JP29805185 A JP 29805185A JP S62154315 A JPS62154315 A JP S62154315A
Authority
JP
Japan
Prior art keywords
film
magnetic
head
frequency characteristic
magnetic head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29805185A
Other languages
Japanese (ja)
Inventor
Tomohisa Komoda
智久 薦田
Narimitsu Kakiwaki
成光 垣脇
Atsuo Mukai
向井 厚雄
Mamoru Ishizuka
守 石塚
Mitsuhiko Yoshikawa
吉川 光彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP29805185A priority Critical patent/JPS62154315A/en
Publication of JPS62154315A publication Critical patent/JPS62154315A/en
Pending legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

PURPOSE:To improve a high-frequency characteristic by using a thin soft amorphous magnetic metallic film having the excellent high-frequency characteristic. CONSTITUTION:A Co-Zr-Nb film 2 is formed to the thickness corresponding to the track width of a magnetic head on a nonmagnetic substrate 1 such as glass, ceramics. A protective film 3 consisting of SiO2 or Al2O3 is formed on the film 2. Low melting glass is further coated on the film 3 and a nonmagnetic substrate 1' is mounted thereon. The magnetic core having the construction in which such Co-Zr-Nb film 2 is sandwiched by the nonmagnetic substrates 1, 1' is cut to form a groove 8 for coil winding and to set a gap depth to a prescribed value. Tapered flat parts 9 are then worked and a head slider 12 is manufactured. The good high-frequency characteristic is obtd. by using the thin soft amorphous magnetic metallic film having large specific resistance. There is no need for adopting a lamination construction in the case of specifying the track width to about 20mum and the process for manufacture is simplified. Since the excellent magnetic characteristics are maintained even with the thin film of <=3mum, this magnetic head is satisfactorily applicable to the smaller track widths.

Description

【発明の詳細な説明】 く技術分野〉 本発明は、ハードディスク用浮上型高密度磁気記録用と
して好適な磁気ヘッドに関するものである。
DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to a magnetic head suitable for floating high-density magnetic recording for hard disks.

〈従来技術〉 近年、磁気記録の分野において記録密度の向上は著しく
、それにつれて電磁変換素子としての磁気ヘッドは狭ギ
ャップ化、狭トラツク化へ向けて開発が進められている
。又、高保磁力材料を用いて構成される記録媒体に十分
な2鋒磁界を与えるために、ヘッドコア材料としても飽
和磁束密度の高い、そして記録周波数の増加に伴なって
高周波領域での再生感度向上のために透磁率の高周波特
性の優れた材料が検討されている。
<Prior Art> In recent years, there has been a remarkable increase in recording density in the field of magnetic recording, and as a result, magnetic heads as electromagnetic transducers are being developed with narrower gaps and narrower tracks. In addition, in order to provide a sufficient double magnetic field to a recording medium constructed using a high coercive force material, the head core material has a high saturation magnetic flux density, and as the recording frequency increases, the reproduction sensitivity in the high frequency range improves. Materials with excellent magnetic permeability and high-frequency properties are being considered for this purpose.

ハードディスク用の浮上型ヘッドにおいては、高密度化
に対応して低浮上スライダーや、薄膜ヘッド技術の研究
が行なわれている。ハードディスク用の浮上型ヘッドで
は、浮上させるためにスライダー後端部付近にヘッドが
構成されるが、従来、そのヘッドは構成法によって■モ
ノリシック型、■フェライトコアを非磁性スライダーに
搭載したコンポジット型、■薄膜型等がある。しかし、
これらの磁気ヘッドには、高密度化への対応を行なうに
あたって次のような問題点があった。モノリシック型ヘ
ッドについては狭トラツク化を行なう際に、ヘッドアク
セス部の厚さの低下のために、前記箇所の機械的強度の
低下をまねく。そのためアクセス時の耐久性が低下し、
ヘッドクラッシュが発生しやすくなるためC8Sや長時
間の安定なアクセスには問題がある。コンポジット型ヘ
ッドについては前記モノリシック型の問題点は改善され
たが、コア材料としてフェライトを使用しているため、
飽和磁束密度および透磁率の周波数特性については記録
密度向上という点で十分でない。
Regarding floating heads for hard disks, research is being conducted on low-flying sliders and thin-film head technology in response to higher density. In floating heads for hard disks, the head is constructed near the rear end of the slider in order to make it float. Conventionally, the heads have been constructed depending on the method of construction: ■monolithic type, ■composite type in which a ferrite core is mounted on a non-magnetic slider, ■There are thin film types, etc. but,
These magnetic heads have the following problems when dealing with higher density. In the case of a monolithic head, when the track is narrowed, the thickness of the head access portion is reduced, resulting in a reduction in the mechanical strength of the aforementioned portion. Therefore, the durability during access decreases,
Head crashes are more likely to occur, which poses a problem for C8S and long-term stable access. Although the problems of the monolithic type described above have been improved for composite type heads, since ferrite is used as the core material,
The frequency characteristics of saturation magnetic flux density and magnetic permeability are not sufficient in terms of improving recording density.

薄膜型ヘッドについてはヘッドアクセス部の強度および
コア材料特性の点で、前記2種のヘッドに比べ優れてい
るが、その作製には多くの加工プロセスを必要とするの
で製造上困難であるという問題を有する。
Thin-film heads are superior to the above two types of heads in terms of the strength of the head access part and the properties of the core material, but the problem is that they are difficult to manufacture because they require many processing processes. has.

更にトラック幅10μm以下のヘッドを作製する為には
、コア形状に起因する制約により、十分な特性を発揮せ
しめる事が困難である。これらの諸点に鑑み本発明者等
は軟磁性金属薄膜を非磁性スペーサーを介して突き合わ
せた磁気ヘッドを創案した。しかしこの軟磁性薄膜をは
さみ込んだタイプでは、10μm以下の狭トラツク化や
、加工プロセスも容易であるという特徴を持つものの、
軟磁性薄膜として高周波特性が未だ不十分であった。
Furthermore, in order to manufacture a head with a track width of 10 μm or less, it is difficult to exhibit sufficient characteristics due to restrictions caused by the core shape. In view of these points, the present inventors have devised a magnetic head in which soft magnetic metal thin films are butted together with a non-magnetic spacer interposed therebetween. However, although this type with soft magnetic thin films has the characteristics of a narrow track of 10 μm or less and an easy processing process,
As a soft magnetic thin film, its high frequency properties were still insufficient.

〈発明の目的〉 本発明は、上記問題点を解消するためになされたもので
あり、高周波特性の優れたアモルファス軟磁性金属薄膜
を使用することによって、高周波特性の改善された磁気
ヘッドの提供を目的とする。
<Object of the Invention> The present invention has been made to solve the above problems, and provides a magnetic head with improved high frequency characteristics by using an amorphous soft magnetic metal thin film with excellent high frequency characteristics. purpose.

〈実施例〉 第1図は本発明の一実施例の浮上型高密度磁気記録用ヘ
ッドの斜視図である。センターレールにトラック幅に相
当する厚さの磁気コアがはさみ込まれた構造を持つ。
<Embodiment> FIG. 1 is a perspective view of a floating type high-density magnetic recording head according to an embodiment of the present invention. It has a structure in which a magnetic core with a thickness equivalent to the track width is sandwiched between the center rail.

第2図乃至第6図に上記浮上型高密度磁気肥厚用ヘッド
の製造工程を示す。
2 to 6 show the manufacturing process of the floating type high-density magnetic thickening head.

第2図においてガラス、セラミック等より選択された非
磁性基板1上に、スパッタリング法によりCo−Zr−
Nb膜2を磁気ヘッドのトラック幅に相当する厚さに形
成する。このCo−Zr−Nb膜膜上上は酸化等の防止
、耐摩耗性の向上、また後述する低融点ガラスとの相互
拡散による熱融合での接着強度向上の目的で5i02あ
るいはAl2O3の保護膜3を形成する。さらに、保護
膜3の上に低融点ガラス(あるいは樹脂、はんだ)を被
覆し、その上に第3図の如く非磁性基板IIを搭載し、
次に第4図の如く両弁磁性基板!、1′を加圧治具6の
中で、外方より圧力(P)でコア部全体を加圧支持する
0 上記低融点ガラスとしては、シート状あるいは薄膜のも
のを用いてもよい。又、上記低融点ガラスによる接着強
度の向上の為に保護膜3上及び非磁性基板1′内面上に
非磁性金属薄膜を形成しておく事が好ましい。
In FIG. 2, Co-Zr-
The Nb film 2 is formed to a thickness corresponding to the track width of the magnetic head. On this Co-Zr-Nb film, a protective film 3 of 5i02 or Al2O3 is applied for the purpose of preventing oxidation, etc., improving wear resistance, and improving adhesive strength during thermal fusion through interdiffusion with low melting point glass, which will be described later. form. Furthermore, the protective film 3 is coated with low melting point glass (or resin, solder), and the non-magnetic substrate II is mounted on it as shown in FIG.
Next, as shown in Figure 4, the magnetic board for both valves! , 1' are pressed and supported from the outside by pressure (P) from the outside in the pressing jig 6. The low melting point glass may be in the form of a sheet or a thin film. Further, in order to improve the adhesive strength of the low-melting point glass, it is preferable to form a non-magnetic metal thin film on the protective film 3 and on the inner surface of the non-magnetic substrate 1'.

以上の工程により、Co−Zr−Nb膜2が非磁性基板
I、1′によってはさみ込まれた構造をもつ磁気コアを
作製することができる。
Through the above steps, a magnetic core having a structure in which the Co--Zr--Nb film 2 is sandwiched between the nonmagnetic substrates I and 1' can be manufactured.

次に第5図のABCDで囲まれる平面でこのコアを切断
し、ABCDで切断した面について、その一方にコイル
巻線の為の溝8を入れ、さらに表面を精密研磨し、ギャ
ップ突合せ前のコア部材とする。次に磁気的なギャップ
スペーサ−(Si02゜Al2O3膜等の非磁性膜)を
介してギャップ形式以上により第6図の如く磁気ヘッド
のブロックが形成される。
Next, this core is cut along the plane surrounded by ABCD in Fig. 5, and a groove 8 for coil winding is made on one side of the cut surface ABCD, and the surface is precision polished, and the Use it as a core member. Next, a magnetic head block is formed using a gap method via a magnetic gap spacer (a non-magnetic film such as a Si02°Al2O3 film) as shown in FIG.

さらにこの様に形成されたブロックを例えば次の様な工
程を経る事により、浮上型ヘッドスライダ−の形状に加
工を行なう。
Further, the block thus formed is processed into the shape of a flying head slider by, for example, the following steps.

まず、媒体対向面(第6図の上面)の鏡面仕上げを行な
う。この時ギャップデプスdを所定の値に設定する。次
に、テーパーフラット部(第1図の符号9)の加工を施
こし、さらに、所定の浮上量が得られる様にレール(第
1図の符号+0)加工を行なう。この後前述のコアの片
側(第5図でカットした部分)をスライスして一部除去
し、その後巻線を施こす。最終的に、このヘッドスライ
ダ−】2を第7図の如くサスペンシラン11に取付ける
事によって、浮上型磁気ヘッドが作製される。同図で1
3はジンバル板バネでアル。
First, the medium facing surface (the upper surface in FIG. 6) is mirror-finished. At this time, the gap depth d is set to a predetermined value. Next, the tapered flat portion (number 9 in FIG. 1) is processed, and the rail (number +0 in FIG. 1) is further processed to obtain a predetermined flying height. Thereafter, one side of the core (the part cut in FIG. 5) is sliced and partially removed, and then winding is applied. Finally, by attaching this head slider 2 to the suspension 11 as shown in FIG. 7, a flying magnetic head is manufactured. 1 in the same figure
3 is a gimbal leaf spring.

上記実施例では、スライダーはテーパーフラット型正圧
スライダーを示したが、他の正圧型あるいは負圧型スラ
イダーにも適用できる。
In the above embodiment, the slider is a tapered flat type positive pressure slider, but other positive pressure type or negative pressure type sliders can also be applied.

〈発明の効果〉 本発明では、比抵抗の大きなアモルファス軟磁性金属薄
膜を用いるため、センダスト等に比べ渦電流損失が少な
く、高周波特性に優れており、また、20μm程度のト
ラック幅とする場合、ラミネート構造とする必要がなく
、コア作製工程が簡略化できる。さらに3μm以下の薄
膜でも優れた磁気特性を維持できる為、超狭トラック化
に際して十分対応できる。
<Effects of the Invention> In the present invention, since an amorphous soft magnetic metal thin film with a large specific resistance is used, it has less eddy current loss and excellent high frequency characteristics than Sendust etc., and when the track width is about 20 μm, There is no need for a laminate structure, and the core manufacturing process can be simplified. Furthermore, since excellent magnetic properties can be maintained even with a thin film of 3 μm or less, it is sufficient to support ultra-narrow tracks.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に係る磁気ヘッドの1実施例を示すスラ
イダーの斜視図、第2図乃至第6図はその製造工程を示
す斜視図、第7図は浮上型磁気ヘッドの斜視図を示す。 図中、 1.1’:非磁性基板 2:軟磁性金属薄膜3:保護膜
 6:加圧部材 8:溝 9:テーパフラット部 10
:レール 11:サスペンション 12:ヘッドスライ
ダ−I3ニシンパル板バネ 代理人 弁理士 福 士 愛 彦(他2名)第2図 第3図 第6図 第7図
FIG. 1 is a perspective view of a slider showing one embodiment of the magnetic head according to the present invention, FIGS. 2 to 6 are perspective views showing the manufacturing process thereof, and FIG. 7 is a perspective view of a floating magnetic head. . In the figure, 1.1': Non-magnetic substrate 2: Soft magnetic metal thin film 3: Protective film 6: Pressure member 8: Groove 9: Tapered flat part 10
: Rail 11: Suspension 12: Head slider - I3 Nishinpal leaf spring Agent Patent attorney Aihiko Fukushi (and 2 others) Fig. 2 Fig. 3 Fig. 6 Fig. 7

Claims (1)

【特許請求の範囲】[Claims] 1、軟磁性金属薄膜が非磁性基板によってはさみ込まれ
た構造を有する磁気ヘッドにおいて、前記軟磁性金属薄
膜として、アモルファス軟磁性金属薄膜を用いたことを
特徴とする磁気ヘッド。
1. A magnetic head having a structure in which a soft magnetic metal thin film is sandwiched between nonmagnetic substrates, characterized in that an amorphous soft magnetic metal thin film is used as the soft magnetic metal thin film.
JP29805185A 1985-12-27 1985-12-27 Magnetic head Pending JPS62154315A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29805185A JPS62154315A (en) 1985-12-27 1985-12-27 Magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29805185A JPS62154315A (en) 1985-12-27 1985-12-27 Magnetic head

Publications (1)

Publication Number Publication Date
JPS62154315A true JPS62154315A (en) 1987-07-09

Family

ID=17854493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29805185A Pending JPS62154315A (en) 1985-12-27 1985-12-27 Magnetic head

Country Status (1)

Country Link
JP (1) JPS62154315A (en)

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