JPS6215318B2 - - Google Patents
Info
- Publication number
- JPS6215318B2 JPS6215318B2 JP53051828A JP5182878A JPS6215318B2 JP S6215318 B2 JPS6215318 B2 JP S6215318B2 JP 53051828 A JP53051828 A JP 53051828A JP 5182878 A JP5182878 A JP 5182878A JP S6215318 B2 JPS6215318 B2 JP S6215318B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- workpiece
- processing
- charged particle
- particle beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012545 processing Methods 0.000 claims description 56
- 239000002245 particle Substances 0.000 claims description 37
- 238000003672 processing method Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 description 5
- 239000011148 porous material Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 239000005337 ground glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5182878A JPS54143743A (en) | 1978-04-29 | 1978-04-29 | Adjustment of charge carrier beam working machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5182878A JPS54143743A (en) | 1978-04-29 | 1978-04-29 | Adjustment of charge carrier beam working machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54143743A JPS54143743A (en) | 1979-11-09 |
| JPS6215318B2 true JPS6215318B2 (zh) | 1987-04-07 |
Family
ID=12897731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5182878A Granted JPS54143743A (en) | 1978-04-29 | 1978-04-29 | Adjustment of charge carrier beam working machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54143743A (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03102180U (zh) * | 1990-02-01 | 1991-10-24 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49120662A (zh) * | 1973-03-16 | 1974-11-18 |
-
1978
- 1978-04-29 JP JP5182878A patent/JPS54143743A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49120662A (zh) * | 1973-03-16 | 1974-11-18 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03102180U (zh) * | 1990-02-01 | 1991-10-24 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54143743A (en) | 1979-11-09 |
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