JPS62153047U - - Google Patents
Info
- Publication number
- JPS62153047U JPS62153047U JP1986041548U JP4154886U JPS62153047U JP S62153047 U JPS62153047 U JP S62153047U JP 1986041548 U JP1986041548 U JP 1986041548U JP 4154886 U JP4154886 U JP 4154886U JP S62153047 U JPS62153047 U JP S62153047U
- Authority
- JP
- Japan
- Prior art keywords
- adhesive layer
- carrier member
- polishing
- ether
- ether adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 6
- 239000012790 adhesive layer Substances 0.000 claims description 4
- 238000005498 polishing Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims description 2
- 238000003780 insertion Methods 0.000 claims description 2
- 239000004721 Polyphenylene oxide Substances 0.000 claims 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 1
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive effect Effects 0.000 claims 1
- 239000003054 catalyst Substances 0.000 claims 1
- 238000004132 cross linking Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229920000570 polyether Polymers 0.000 claims 1
- 239000002390 adhesive tape Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Description
第１図は本考案の研磨用保持部材の一例を示す
断面図であり、第２図は異なる例を示す断面図で
ある。
１，１′…研磨用パツド、２，２′…キヤリア
部材、２１，２１′…挿通孔、３，３′…不透水
性シート、４，４′…エーテル系粘着剤層、５，
５′…異なる粘着剤層、６…基材フイルム、７…
両面粘着テープ。
FIG. 1 is a sectional view showing an example of the polishing holding member of the present invention, and FIG. 2 is a sectional view showing a different example. 1, 1'... Polishing pad, 2, 2'... Carrier member, 21, 21'... Insertion hole, 3, 3'... Water impermeable sheet, 4, 4'... Ether adhesive layer, 5,
5'... Different adhesive layer, 6... Base film, 7...
Double-sided adhesive tape.
Claims (1)
研磨材を挿入するための挿通孔が設けられたキヤ
リア部材が順次積層され、他面に、分子内に少な
くとも１個の反応性シラン基を有するポリエーテ
ルと粘着付与剤と架橋触媒とからなるエーテル系
粘着剤層が、該エーテル系粘着剤とは異なる粘着
剤層を介して積層されてなる研磨用保持部材。 A carrier member provided with an insertion hole for inserting a polishing pad and a material to be polished is sequentially laminated on one side of the water-impermeable sheet, and a carrier member having at least one reactive silane group in the molecule is layered on the other side. A polishing holding member in which an ether adhesive layer made of polyether, a tackifier, and a crosslinking catalyst is laminated via an adhesive layer different from the ether adhesive.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986041548U JPH0321894Y2 (en) | 1986-03-19 | 1986-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986041548U JPH0321894Y2 (en) | 1986-03-19 | 1986-03-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62153047U true JPS62153047U (en) | 1987-09-28 |
| JPH0321894Y2 JPH0321894Y2 (en) | 1991-05-13 |
Family
ID=30856651
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986041548U Expired JPH0321894Y2 (en) | 1986-03-19 | 1986-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0321894Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH024751U (en) * | 1988-06-21 | 1990-01-12 | ||
| JP4686010B2 (en) * | 2000-07-18 | 2011-05-18 | ニッタ・ハース株式会社 | Polishing pad |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52117692A (en) * | 1976-03-30 | 1977-10-03 | Agency Of Ind Science & Technol | Preparation of sample with polished surface |
| JPS6121174A (en) * | 1984-07-09 | 1986-01-29 | Sekisui Chem Co Ltd | Tacky tape or sheet for surface protection |
-
1986
- 1986-03-19 JP JP1986041548U patent/JPH0321894Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52117692A (en) * | 1976-03-30 | 1977-10-03 | Agency Of Ind Science & Technol | Preparation of sample with polished surface |
| JPS6121174A (en) * | 1984-07-09 | 1986-01-29 | Sekisui Chem Co Ltd | Tacky tape or sheet for surface protection |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH024751U (en) * | 1988-06-21 | 1990-01-12 | ||
| JP4686010B2 (en) * | 2000-07-18 | 2011-05-18 | ニッタ・ハース株式会社 | Polishing pad |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0321894Y2 (en) | 1991-05-13 |