JPS62153046U - - Google Patents
Info
- Publication number
- JPS62153046U JPS62153046U JP1986041547U JP4154786U JPS62153046U JP S62153046 U JPS62153046 U JP S62153046U JP 1986041547 U JP1986041547 U JP 1986041547U JP 4154786 U JP4154786 U JP 4154786U JP S62153046 U JPS62153046 U JP S62153046U
- Authority
- JP
- Japan
- Prior art keywords
- laminated
- adhesive layer
- polyether
- based adhesive
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 4
- 239000012790 adhesive layer Substances 0.000 claims description 4
- 238000005498 polishing Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims description 2
- 238000003780 insertion Methods 0.000 claims description 2
- 239000004721 Polyphenylene oxide Substances 0.000 claims 2
- 229920000570 polyether Polymers 0.000 claims 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 1
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive effect Effects 0.000 claims 1
- 239000003054 catalyst Substances 0.000 claims 1
- 238000004132 cross linking Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
- 239000002390 adhesive tape Substances 0.000 description 1
Description
第１図は本考案の研磨用保持部材の一例を示す
断面図であり、第２図は異なる例を示す断面図で
ある。
１，１′…研磨用パツド、２，２′…キヤリア
部材、２１，２１′…挿通孔、３，３′…エーテ
ル系粘着剤層、４，４′…異なる粘着剤層、５…
基材フイルム、６…両面粘着テープ。
FIG. 1 is a sectional view showing an example of the polishing holding member of the present invention, and FIG. 2 is a sectional view showing a different example. 1, 1'... Polishing pad, 2, 2'... Carrier member, 21, 21'... Insertion hole, 3, 3'... Ether adhesive layer, 4, 4'... Different adhesive layer, 5...
Base film, 6...Double-sided adhesive tape.
Claims (1)
めの挿通孔が設けられたキヤリア部材が積層され
、他面に、分子内に少なくとも１個の反応性シラ
ン基を有するポリエーテルと粘着付与剤と架橋触
媒とからなるエーテル系粘着剤層が、該ポリエー
テル系粘着剤とは異なる粘着剤層を介して積層さ
れてなる研磨用保護部材。 A carrier member having an insertion hole for inserting the material to be polished is laminated on one side of the polishing pad, and a tackifier and a polyether having at least one reactive silane group in the molecule are laminated on the other side. A protective member for polishing, in which an ether-based adhesive layer consisting of and a crosslinking catalyst is laminated via an adhesive layer different from the polyether-based adhesive.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986041547U JPH0321893Y2 (en) | 1986-03-19 | 1986-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986041547U JPH0321893Y2 (en) | 1986-03-19 | 1986-03-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62153046U true JPS62153046U (en) | 1987-09-28 |
| JPH0321893Y2 JPH0321893Y2 (en) | 1991-05-13 |
Family
ID=30856650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986041547U Expired JPH0321893Y2 (en) | 1986-03-19 | 1986-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0321893Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52117692A (en) * | 1976-03-30 | 1977-10-03 | Agency Of Ind Science & Technol | Preparation of sample with polished surface |
| JPS6121174A (en) * | 1984-07-09 | 1986-01-29 | Sekisui Chem Co Ltd | Tacky tape or sheet for surface protection |
-
1986
- 1986-03-19 JP JP1986041547U patent/JPH0321893Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52117692A (en) * | 1976-03-30 | 1977-10-03 | Agency Of Ind Science & Technol | Preparation of sample with polished surface |
| JPS6121174A (en) * | 1984-07-09 | 1986-01-29 | Sekisui Chem Co Ltd | Tacky tape or sheet for surface protection |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0321893Y2 (en) | 1991-05-13 |
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