JPS62151770U - - Google Patents
Info
- Publication number
- JPS62151770U JPS62151770U JP3882686U JP3882686U JPS62151770U JP S62151770 U JPS62151770 U JP S62151770U JP 3882686 U JP3882686 U JP 3882686U JP 3882686 U JP3882686 U JP 3882686U JP S62151770 U JPS62151770 U JP S62151770U
- Authority
- JP
- Japan
- Prior art keywords
- piezoresistive element
- diaphragm
- pressure
- semiconductor
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3882686U JPH058684Y2 (https=) | 1986-03-17 | 1986-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3882686U JPH058684Y2 (https=) | 1986-03-17 | 1986-03-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62151770U true JPS62151770U (https=) | 1987-09-26 |
| JPH058684Y2 JPH058684Y2 (https=) | 1993-03-04 |
Family
ID=30851437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3882686U Expired - Lifetime JPH058684Y2 (https=) | 1986-03-17 | 1986-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH058684Y2 (https=) |
-
1986
- 1986-03-17 JP JP3882686U patent/JPH058684Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH058684Y2 (https=) | 1993-03-04 |