JPS62151747U - - Google Patents
Info
- Publication number
- JPS62151747U JPS62151747U JP3930986U JP3930986U JPS62151747U JP S62151747 U JPS62151747 U JP S62151747U JP 3930986 U JP3930986 U JP 3930986U JP 3930986 U JP3930986 U JP 3930986U JP S62151747 U JPS62151747 U JP S62151747U
- Authority
- JP
- Japan
- Prior art keywords
- alignment mark
- semiconductor wafer
- etching
- back side
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3930986U JPS62151747U (da) | 1986-03-18 | 1986-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3930986U JPS62151747U (da) | 1986-03-18 | 1986-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62151747U true JPS62151747U (da) | 1987-09-26 |
Family
ID=30852346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3930986U Pending JPS62151747U (da) | 1986-03-18 | 1986-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62151747U (da) |
-
1986
- 1986-03-18 JP JP3930986U patent/JPS62151747U/ja active Pending