JPS62149044U - - Google Patents
Info
- Publication number
- JPS62149044U JPS62149044U JP1986036144U JP3614486U JPS62149044U JP S62149044 U JPS62149044 U JP S62149044U JP 1986036144 U JP1986036144 U JP 1986036144U JP 3614486 U JP3614486 U JP 3614486U JP S62149044 U JPS62149044 U JP S62149044U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle body
- frame
- cleaned
- joined
- pellicle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 claims 1
- 238000002834 transmittance Methods 0.000 claims 1
- 239000012790 adhesive layer Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986036144U JPH0529474Y2 (da) | 1986-03-14 | 1986-03-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986036144U JPH0529474Y2 (da) | 1986-03-14 | 1986-03-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62149044U true JPS62149044U (da) | 1987-09-21 |
JPH0529474Y2 JPH0529474Y2 (da) | 1993-07-28 |
Family
ID=30846276
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986036144U Expired - Lifetime JPH0529474Y2 (da) | 1986-03-14 | 1986-03-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0529474Y2 (da) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60237450A (ja) * | 1984-05-11 | 1985-11-26 | Asahi Chem Ind Co Ltd | 非反射性フオトマスク・レチクル用防塵カバ−体及びその製造方法 |
-
1986
- 1986-03-14 JP JP1986036144U patent/JPH0529474Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60237450A (ja) * | 1984-05-11 | 1985-11-26 | Asahi Chem Ind Co Ltd | 非反射性フオトマスク・レチクル用防塵カバ−体及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0529474Y2 (da) | 1993-07-28 |