JPS6214732U - - Google Patents

Info

Publication number
JPS6214732U
JPS6214732U JP10544585U JP10544585U JPS6214732U JP S6214732 U JPS6214732 U JP S6214732U JP 10544585 U JP10544585 U JP 10544585U JP 10544585 U JP10544585 U JP 10544585U JP S6214732 U JPS6214732 U JP S6214732U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
suction
negative pressure
concave portion
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10544585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10544585U priority Critical patent/JPS6214732U/ja
Publication of JPS6214732U publication Critical patent/JPS6214732U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP10544585U 1985-07-12 1985-07-12 Pending JPS6214732U (US20080094685A1-20080424-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10544585U JPS6214732U (US20080094685A1-20080424-C00004.png) 1985-07-12 1985-07-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10544585U JPS6214732U (US20080094685A1-20080424-C00004.png) 1985-07-12 1985-07-12

Publications (1)

Publication Number Publication Date
JPS6214732U true JPS6214732U (US20080094685A1-20080424-C00004.png) 1987-01-29

Family

ID=30979882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10544585U Pending JPS6214732U (US20080094685A1-20080424-C00004.png) 1985-07-12 1985-07-12

Country Status (1)

Country Link
JP (1) JPS6214732U (US20080094685A1-20080424-C00004.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0230159A (ja) * 1988-07-20 1990-01-31 Nikon Corp 基板吸着装置
KR100331165B1 (ko) * 1999-08-05 2002-04-01 김도열 소자 일괄 제조용 지그 및 이를 이용한 소자 일괄 제조방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0230159A (ja) * 1988-07-20 1990-01-31 Nikon Corp 基板吸着装置
KR100331165B1 (ko) * 1999-08-05 2002-04-01 김도열 소자 일괄 제조용 지그 및 이를 이용한 소자 일괄 제조방법

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