JPS62145790A - 短波長放射光システム - Google Patents

短波長放射光システム

Info

Publication number
JPS62145790A
JPS62145790A JP28561185A JP28561185A JPS62145790A JP S62145790 A JPS62145790 A JP S62145790A JP 28561185 A JP28561185 A JP 28561185A JP 28561185 A JP28561185 A JP 28561185A JP S62145790 A JPS62145790 A JP S62145790A
Authority
JP
Japan
Prior art keywords
wavelength
light
dye
section
short
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28561185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0374516B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Ken Ishikawa
憲 石川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP28561185A priority Critical patent/JPS62145790A/ja
Publication of JPS62145790A publication Critical patent/JPS62145790A/ja
Publication of JPH0374516B2 publication Critical patent/JPH0374516B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2308—Amplifier arrangements, e.g. MOPA
    • H01S3/2325—Multi-pass amplifiers, e.g. regenerative amplifiers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S4/00—Devices using stimulated emission of electromagnetic radiation in wave ranges other than those covered by groups H01S1/00, H01S3/00 or H01S5/00, e.g. phonon masers, X-ray lasers or gamma-ray lasers

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Lasers (AREA)
JP28561185A 1985-12-20 1985-12-20 短波長放射光システム Granted JPS62145790A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28561185A JPS62145790A (ja) 1985-12-20 1985-12-20 短波長放射光システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28561185A JPS62145790A (ja) 1985-12-20 1985-12-20 短波長放射光システム

Publications (2)

Publication Number Publication Date
JPS62145790A true JPS62145790A (ja) 1987-06-29
JPH0374516B2 JPH0374516B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-11-27

Family

ID=17693767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28561185A Granted JPS62145790A (ja) 1985-12-20 1985-12-20 短波長放射光システム

Country Status (1)

Country Link
JP (1) JPS62145790A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05290993A (ja) * 1992-04-13 1993-11-05 Nikon Corp レーザプラズマｘ線源
WO2010093903A3 (en) * 2009-02-13 2010-12-02 Kla-Tencor Corporation Optical pumping to sustain hot plasma
JP2012204818A (ja) * 2011-03-28 2012-10-22 Gigaphoton Inc レーザシステムおよびレーザ生成方法
JP2012204820A (ja) * 2011-03-28 2012-10-22 Gigaphoton Inc レーザシステムおよびレーザ生成方法
WO2013003274A1 (en) * 2011-06-29 2013-01-03 Kla-Tencor Corporation Optically pumping to sustain plasma

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05290993A (ja) * 1992-04-13 1993-11-05 Nikon Corp レーザプラズマｘ線源
WO2010093903A3 (en) * 2009-02-13 2010-12-02 Kla-Tencor Corporation Optical pumping to sustain hot plasma
US8698399B2 (en) 2009-02-13 2014-04-15 Kla-Tencor Corporation Multi-wavelength pumping to sustain hot plasma
JP2012204818A (ja) * 2011-03-28 2012-10-22 Gigaphoton Inc レーザシステムおよびレーザ生成方法
JP2012204820A (ja) * 2011-03-28 2012-10-22 Gigaphoton Inc レーザシステムおよびレーザ生成方法
US9184555B2 (en) 2011-03-28 2015-11-10 Gigaphoton Inc. Laser system and laser light generation method
WO2013003274A1 (en) * 2011-06-29 2013-01-03 Kla-Tencor Corporation Optically pumping to sustain plasma

Also Published As

Publication number Publication date
JPH0374516B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-11-27

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