JPS6214363U - - Google Patents

Info

Publication number
JPS6214363U
JPS6214363U JP10553685U JP10553685U JPS6214363U JP S6214363 U JPS6214363 U JP S6214363U JP 10553685 U JP10553685 U JP 10553685U JP 10553685 U JP10553685 U JP 10553685U JP S6214363 U JPS6214363 U JP S6214363U
Authority
JP
Japan
Prior art keywords
moisture
alumina substrate
temperature
comb
shaped electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10553685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10553685U priority Critical patent/JPS6214363U/ja
Publication of JPS6214363U publication Critical patent/JPS6214363U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP10553685U 1985-07-12 1985-07-12 Pending JPS6214363U (US06272168-20010807-M00014.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10553685U JPS6214363U (US06272168-20010807-M00014.png) 1985-07-12 1985-07-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10553685U JPS6214363U (US06272168-20010807-M00014.png) 1985-07-12 1985-07-12

Publications (1)

Publication Number Publication Date
JPS6214363U true JPS6214363U (US06272168-20010807-M00014.png) 1987-01-28

Family

ID=30980059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10553685U Pending JPS6214363U (US06272168-20010807-M00014.png) 1985-07-12 1985-07-12

Country Status (1)

Country Link
JP (1) JPS6214363U (US06272168-20010807-M00014.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004340946A (ja) * 2003-04-11 2004-12-02 Therm-O-Disc Inc 頑丈なケミレジスタセンサ
JP2006300835A (ja) * 2005-04-22 2006-11-02 Denso Corp 容量式湿度センサおよびその製造方法
JP2008064561A (ja) * 2006-09-06 2008-03-21 Denso Corp 湿度センサ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004340946A (ja) * 2003-04-11 2004-12-02 Therm-O-Disc Inc 頑丈なケミレジスタセンサ
JP4668548B2 (ja) * 2003-04-11 2011-04-13 サーム−オー−ディスク・インコーポレイテッド 頑丈なケミレジスタセンサ
JP2006300835A (ja) * 2005-04-22 2006-11-02 Denso Corp 容量式湿度センサおよびその製造方法
JP2008064561A (ja) * 2006-09-06 2008-03-21 Denso Corp 湿度センサ

Similar Documents

Publication Publication Date Title
JPS6214363U (US06272168-20010807-M00014.png)
JPS59173742A (ja) 温湿度センサ−
JPH0523124U (ja) 静電容量式湿度センサ
JPS62104151U (US06272168-20010807-M00014.png)
JPH045602U (US06272168-20010807-M00014.png)
JPS6325339U (US06272168-20010807-M00014.png)
JPH01121845U (US06272168-20010807-M00014.png)
JPS62170559U (US06272168-20010807-M00014.png)
JPH0438558U (US06272168-20010807-M00014.png)
JPH0421853U (US06272168-20010807-M00014.png)
JPS6126163U (ja) 温湿度感知素子
JPS6063452A (ja) 感湿素子
JPS61137259U (US06272168-20010807-M00014.png)
JPH01148853U (US06272168-20010807-M00014.png)
JPS6363731U (US06272168-20010807-M00014.png)
JPH0452683Y2 (US06272168-20010807-M00014.png)
JPS5856962U (ja) 温・湿度受感装置
JPS62114354U (US06272168-20010807-M00014.png)
JPS61202065U (US06272168-20010807-M00014.png)
JPH0415057U (US06272168-20010807-M00014.png)
JPS63105067U (US06272168-20010807-M00014.png)
JPS5814149U (ja) 温度補償付き感湿装置
JPH03295459A (ja) 湿度センサ
JPS5830931U (ja) ガイドシリンダ
JPH03113169U (US06272168-20010807-M00014.png)