JPS62143416A - Semiconductor manufacturing device - Google Patents

Abstract

PURPOSE:To property perform maintenance and control operations by a method wherein the phenomena in a command and the input of a parameter are automatically registered in a file in the order of occurrence together with the time of occurrence and the like. CONSTITUTION:In the projecting and exposing device composed of a main body CPU 21 with which an entire manufacturing device is controlled, a wafer stage driving device 22, a reticle stage driving device 24, a focus detecting system 27, a conveying system 29, an illuminating system 25, a console unit 30, with which various kinds of commands and a parameter relating to the operation of the manufacturing device are given to the CPU 21, and when a command is inputted by the operator in a command input waiting state, first, its name of command is recorded in the outside memory 32 of the unit 30 together with the date and the time of input. Then, the movement of the sequence following the command is started. The same procedure is performed every time a new phenomenon is generated, and when the sequence operation is finished, the device becomes a next command input waiting state.

Description

[Detailed Description of the Invention] [Field of the Invention] The present invention relates to an apparatus for manufacturing semiconductor devices such as LSI and VLSI, and in particular, to an apparatus for automatically recording events that occur during operation of the apparatus, and further for recording the recorded data. The present invention relates to a semiconductor manufacturing device that can display images as appropriate.

[Background of the Invention 1] As the degree of integration of semiconductor integrated circuits increases, efforts are being made to improve the functionality and performance of semiconductor manufacturing equipment.

As these devices become more sophisticated and performant, the number of commands and parameters used to operate these types of devices has also increased significantly. Furthermore, the number of types of sequences that perform a predetermined series of operations has increased, and the events that occur during sequence operations have become diverse. Here, the event refers to input of commands and parameters by the operator, sequence passage information issued from the device, status, warning, error information, etc.

Each of these numerous commands and parameters plays an important role in controlling the operation of the semiconductor manufacturing equipment, and is indispensable for maximizing the functionality of the equipment.

Further, information regarding input events such as commands and events occurring during sequence operations is important information for grasping the operating status of the semiconductor manufacturing equipment and performing maintenance management.

However, because of the large number of them, when a certain event, particularly a warning or error, occurs, it is difficult to understand the cause of the event and take appropriate measures. In other words, in order to know the cause, it is necessary to know what operations were performed before the event occurred and what events occurred, but since there are many and complex cases, it is difficult for operators to It is simply impossible for engineers to remember it. This situation is a particular problem in the IC manufacturing process where equipment abnormalities must be promptly recovered.

[Object of the Invention] In view of the above-mentioned problems of the conventional method, the present invention provides information regarding the events of inputting commands and parameters performed by an operator, etc., and the events that occurred due to these inputs. The object of the present invention is to provide a semiconductor manufacturing device that can appropriately maintain and manage the device, based on the concept of having a function of automatically recording the file along with the time and the like and a function of reading it.

[Explanation of Examples] Hereinafter, the present invention will be described in detail with reference to the drawings.

FIG. 1 shows the appearance of a projection exposure apparatus according to an embodiment of the present invention. In the figure, reference numeral 1 denotes a mask having an integrated circuit pattern, and also includes mask alignment marks and mask-wafer alignment marks. 2 is a mask stage that holds mask 1 and moves mask 1 within a plane (XY
direction) and rotational direction (θ direction). 3 is a reduction projection lens, 4 is a wafer provided with a photosensitive layer, and is provided with a mask/wafer alignment mark, a television/wafer alignment mark, and a mention mark. 5 is a wafer stage.

The wafer stage 5 holds the wafer 4 and moves it in the plane and in the rotational direction, and also moves between the wafer printing position (within the projection field of view) and the television/wafer alignment position. Reference numeral 6 indicates an objective lens of a television/wafer alignment detection device, 7 indicates a carrier tube or a solid-state image element, and 9 indicates a binocular unit, which serves to observe the surface of the wafer 4 through the projection lens 3. Reference numeral 10 designates an upper unit 1 to house an illumination optical system and a detection device for mask-wafer alignment. 11 is a console monitor receiver (console CRT) that gives commands to the main body of the projection exposure apparatus;
12 is a keyboard for giving commands to the device and inputting parameters;

FIG. 2 is a block diagram showing the electrical circuit configuration of the projection exposure apparatus of FIG. 1. In the figure, reference numeral 21 denotes a main body CPU which controls the entire apparatus, and is composed of a central processing unit such as a microcomputer or a minicomputer. 22 is the Eva stage drive device, 23 is the alignment detection system,
24 is a reticle stage drive device, 25 is an illumination system, 26
27 is a shutter drive device, 27 is a focus detection system, and 28 is a Z drive device, which are controlled by the main body CPU 21. 29 is a conveyance system.

Reference numeral 30 denotes a console unit for giving various commands and parameters regarding the operation of this exposure apparatus to the main CPU 21. 31 is the console CPU, 32
is an external memory that stores parameters and the like. Also, 3
3 is a printer for recording parameters and file contents. Note that the CRTll and keyboard 12 are the same as those shown in FIG.

FIG. 3 is a flowchart showing how events are filed into occurrence classes. Referring to the figure, when a command is input by an operator in a command input waiting state, the command name is first recorded (written) in a recording file along with the input date and time. There is an external memory 32 of the console unit 30 shown in Figure 2.Next, a sequence operation according to the command begins.When an event 1 occurs during the operation, information regarding the event 1 is recorded.

Thereafter, each time an event occurs, the event is recorded along with the date and time of occurrence, and the sequence operation ends. Upon completion, the fact that the process has ended, the date and time of the end of the sequence, etc. are recorded, and the state waits for the next command input.

A recording file is created in the manner described above.

FIG. 4 is an example of printing the contents of the recording file output to a printer. This example shows events that occur during a series of sequential operations of a semiconductor manufacturing apparatus that exposes 25 wafers in 10 shots using a step-and-repeat method consisting of 36 shots per wafer. In this example, at event number 9, the third shot of the first wafer is in auto alignment! - It can be seen that exposure could not be performed due to a defect. Furthermore, in event number 13, since the power of the laser is decreasing, a warning is generated indicating that it is better to replace the laser. The event number indicates that a communication error (between the main unit and the console) occurred, but the automatic recommunication function recovered the error and continued the next sequence. In this way,
Information necessary for managing processes and equipment can be obtained, such as that the chip in the third shot of the first wafer is defective and that the laser needs to be replaced.

Next, the flowchart of FIG. 5 and FIG. 6a.

1 and 2 while referring to the display screen example in Figure 6b.
A description will be given of an operation for determining a recording specification indicating how information related to an event is recorded in a recording file in the apparatus shown in the figure.

In this device, when the initialization after the power is turned on and when the execution of a predetermined operation command (command) is completed, the device enters a command input waiting state. In this state, if a command is input to determine the recording specifications for recording event-related information in a file, the specifications can be determined according to the flow shown in the flowchart of FIG.

First, when this command is input, the currently set event recording specifications are displayed on the screen in step S1. Next, when the number assigned to each item (item number) is input in step S2, the part of the item in question in the recording specifications can be changed in step S3.

FIG. 6a shows the situation when "3" is input in step S2 after the screen is displayed in step S1. The currently set recording specifications are displayed in items 1 to 4 in the middle row of the figure. Prompt message [3 select No.
The input "3" is displayed after , or EndJ. "p" indicates pressing of the return key. This enables the recording specification change process in step S3.
The screen will appear as shown in Figure 6b. Here, the type is changed from a state where the file is updated every day to a state where the file is updated every 100 events. That is, in item number 3 in Figure 6a, the type is "Dai".
lyJ, and the file is set to be updated every day, but in Figure 6b, the bottom line shows "100
As a result of inputting [:vents J, the field for item number 3 in the middle of the screen also becomes [100EVentS J, 100
The type has been changed so that the file is updated for each event.

When the change of one item is completed as described above, the process returns to step $1, and the screen showing the recording specifications appears again, and the process waits for item input. Furthermore, as shown in item number 4 in this example, events to be recorded (Record Events
), it is possible to record only necessary events. In Figures 5a and 5b,
Command input (Command), error (E rr
or), Warning (Warnina) and Unexposure (U
The above-mentioned FIG. 4 is an example of recording of these events.

When necessary items have been changed, rEJ indicating the end of processing is inputted in step S2, thereby completing the recording specification determination work.

Next, the flowchart of FIG. 7 and 3a.

1 and 2 while referring to the display screen example in Figure 8b.
The reading operation of the event record file in the device shown in the figure will be explained.

First, when a command to read a recorded file is input in a command input waiting state, the output specifications are displayed on the screen in step 311, and in step 812, the system enters a waiting state for inputting the numbers assigned to each item. Here, if the item number is input, the corresponding item in the output specifications can be changed in step S13.

FIG. 8a shows what happens when "3" is input in step 812 after the screen is displayed in step 811. The currently set output specifications are displayed in items 1 to 4 in the middle row of the figure. prompt message rselect
No, or Qutput or EndJ
After that, the entered "3" is displayed. rDJ indicates pressing of the return key. This enables the output specification change processing in step 813, and the screen becomes as shown in FIG. 8b. Here, the output light (Olltput[)e
vice ) from the CRT screen (CRT) to the printer (P
rinter). Also, by specifying external memory in this item, the contents of the recording file can be copied and saved in the external memory.

Further, in this example, the types of events (Output Events) read out in item number 4 in FIG. 8a are limited to only unexposed shots (IJ neXpO3e ). With such a function, the contents of the recording file can be output for each event, making it easier to understand the desired information.

FIG. 9 shows an example of a record file printed out based on such output specifications.

In this example, events representing the status of normal sequence operations are output even if they are not specified, so in the print example shown in the figure, these normal events and exposure failure events are output.

After determining the desired output specifications in step 313, the process returns to step S11 and displays the output specifications again. Next, in step 812, an output specification is input, and in step 314, the recording file is output to a predetermined device.

Furthermore, when rEJ indicating the end of processing is input, the output work ends.

Next, an example of executing a command recorded in a recording file from a recording file reading operation will be described with reference to the flowchart in FIG. 10 and display screen examples in FIGS. 11a and 1ib.

First, in step S21, only commands are displayed on the screen, as shown in FIG. 11a, in accordance with the event record file reading operation described above. Next, in step 822, the eleventh
When the event number is input as shown in Figure b, the console CPU 31 decodes the command specified by the event number in step 823, and in step 824,
A command execution instruction is issued to the main body CPU 21. In step 825, the main body CPU 21 uses the console C
Upon receiving the execution command from P tJ 31, in step 326, an operation command is issued to each block to execute the corresponding sea fence operation.

If you wish to end the process without doing anything, input rEJ in step S22. This function allows you to reproduce operations that were actually performed without relying on the operator's memory.
It is useful for repeatedly executing complex operations. Further, this function does not have any problem even if an event other than the scene is displayed in step 321.

[Effects of the Invention] As explained above, according to the present invention, events that occur during the operation of semiconductor manufacturing equipment can be automatically recorded and read out as appropriate, so that process management and equipment management can be improved. Maintenance management becomes extremely easy.

[Brief explanation of drawings]

FIG. 1 is an external view of a projection exposure apparatus according to an embodiment of the present invention, FIG. 2 is an electric circuit configuration diagram of the projection exposure apparatus of the above embodiment, and FIG. 3 is a diagram showing how information regarding events is automatically transmitted. A flowchart showing how recording is performed. Figure 4 is a print example of information about recorded events being output to a printer. Figures 5 and 6 are flowcharts for explaining the operation of determining event recording specifications. and a diagram showing a display screen in that case, FIGS. 7 and 8 are a flowchart for explaining the event record file reading operation and a diagram showing a display screen in that case, and FIG. 9 shows a recorded event 10 and 11 are flowcharts for explaining the operation of reading recorded commands and executing commands from the execution flow, and the display screen in that case. FIG. DESCRIPTION OF SYMBOLS 11... 0RT for monitor, 12... Keyboard, 21... Main body CPU, 30... Console, 31... Console CPU, 32...
- External memory, 33...Printer.

Claims (1)

[Claims] 1. In a semiconductor manufacturing device capable of performing multiple types of operations according to operation commands input through an operation command input means, an input event of an operation command and a sequence activated by the operation command are provided. A semiconductor manufacturing device comprising: means for automatically storing information regarding events occurring during operation together with the date and time of occurrence in the order in which these events occurred; and means for reading the stored information. Device. 2. A patent characterized in that the reading means is capable of selectively reading out the stored information, and is capable of executing a reading function for an operation command related to input event information of the stored operation command. A semiconductor manufacturing apparatus according to claim 1.