JPS62143352A - 電子銃 - Google Patents

電子銃

Info

Publication number
JPS62143352A
JPS62143352A JP61283180A JP28318086A JPS62143352A JP S62143352 A JPS62143352 A JP S62143352A JP 61283180 A JP61283180 A JP 61283180A JP 28318086 A JP28318086 A JP 28318086A JP S62143352 A JPS62143352 A JP S62143352A
Authority
JP
Japan
Prior art keywords
grid
electron gun
extraction grid
extraction
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61283180A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0456418B2 (https=
Inventor
ダニエル　ピガシュ
フランソワ　ダネル
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Office National dEtudes et de Recherches Aerospatiales ONERA
Original Assignee
Office National dEtudes et de Recherches Aerospatiales ONERA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Office National dEtudes et de Recherches Aerospatiales ONERA filed Critical Office National dEtudes et de Recherches Aerospatiales ONERA
Publication of JPS62143352A publication Critical patent/JPS62143352A/ja
Publication of JPH0456418B2 publication Critical patent/JPH0456418B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/09707—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using an electron or ion beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Electron Sources, Ion Sources (AREA)
JP61283180A 1985-11-29 1986-11-29 電子銃 Granted JPS62143352A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8517724 1985-11-29
FR8517724A FR2591035B1 (fr) 1985-11-29 1985-11-29 Canon a electrons operant par emission secondaire sous bombardement ionique

Publications (2)

Publication Number Publication Date
JPS62143352A true JPS62143352A (ja) 1987-06-26
JPH0456418B2 JPH0456418B2 (https=) 1992-09-08

Family

ID=9325300

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61283180A Granted JPS62143352A (ja) 1985-11-29 1986-11-29 電子銃

Country Status (5)

Country Link
US (1) US4777370A (https=)
EP (1) EP0228318B1 (https=)
JP (1) JPS62143352A (https=)
DE (1) DE3664396D1 (https=)
FR (1) FR2591035B1 (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63175324A (ja) * 1984-04-02 1988-07-19 住友重機械工業株式会社 プラズマ電子ガン
JPH04196039A (ja) * 1990-11-28 1992-07-15 Toshiba Corp 電子銃
JP2014533346A (ja) * 2011-07-04 2014-12-11 テトラ・ラヴァル・ホールディングス・アンド・ファイナンス・ソシエテ・アノニムＴｅｔｒａ Ｌａｖａｌ Ｈｏｌｄｉｎｇｓ ＆ Ｆｉｎａｎｃｅ Ｓ．Ａ． 冷却フランジを具備する電子ビーム放射器、及び当該電子ビーム放射器を冷却するための方法
JP2016511516A (ja) * 2013-03-15 2016-04-14 ニコン・メトロロジー・エヌヴェ Ｘ線源、高電圧発生器、電子ビーム銃、回転ターゲットアセンブリー、回転ターゲット、及び回転真空シール

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4749911A (en) * 1987-03-30 1988-06-07 Rpc Industries Ion plasma electron gun with dose rate control via amplitude modulation of the plasma discharge
US4786844A (en) * 1987-03-30 1988-11-22 Rpc Industries Wire ion plasma gun
US4977352A (en) * 1988-06-24 1990-12-11 Hughes Aircraft Company Plasma generator having rf driven cathode
US5003226A (en) * 1989-11-16 1991-03-26 Avco Research Laboratories Plasma cathode
EP2079092B1 (fr) 2008-01-11 2010-08-11 Excico Group Dispositif et procédé d'alimentation électrique d'une source d'électrons et source d'électrons à émission secondaire sous bombardement ionique
CN101952931B (zh) * 2008-01-11 2012-09-05 埃克西可集团公司 丝极放电离子源
EP2079096B1 (fr) 2008-01-11 2012-04-18 Excico Group N.V. Source d'ions à décharge électrique par filament
FR2926395B1 (fr) * 2008-01-11 2010-05-14 Excico Group Source pulsee d'electrons, procede d'alimentation electrique pour source pulsee d'electrons et procede de commande d'une source pulsee d'electrons

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2204882B1 (https=) * 1972-10-30 1976-10-29 Onera (Off Nat Aerospatiale)
US3970892A (en) * 1975-05-19 1976-07-20 Hughes Aircraft Company Ion plasma electron gun
JPS58135752U (ja) * 1982-03-05 1983-09-12 ティーディーケイ株式会社 静電式複写機用帯電装置
US4642522A (en) * 1984-06-18 1987-02-10 Hughes Aircraft Company Wire-ion-plasma electron gun employing auxiliary grid

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63175324A (ja) * 1984-04-02 1988-07-19 住友重機械工業株式会社 プラズマ電子ガン
JPH04196039A (ja) * 1990-11-28 1992-07-15 Toshiba Corp 電子銃
JP2014533346A (ja) * 2011-07-04 2014-12-11 テトラ・ラヴァル・ホールディングス・アンド・ファイナンス・ソシエテ・アノニムＴｅｔｒａ Ｌａｖａｌ Ｈｏｌｄｉｎｇｓ ＆ Ｆｉｎａｎｃｅ Ｓ．Ａ． 冷却フランジを具備する電子ビーム放射器、及び当該電子ビーム放射器を冷却するための方法
JP2016511516A (ja) * 2013-03-15 2016-04-14 ニコン・メトロロジー・エヌヴェ Ｘ線源、高電圧発生器、電子ビーム銃、回転ターゲットアセンブリー、回転ターゲット、及び回転真空シール
US9941090B2 (en) 2013-03-15 2018-04-10 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, and rotary vacuum seal
US9947501B2 (en) 2013-03-15 2018-04-17 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US9966217B2 (en) 2013-03-15 2018-05-08 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US10008357B2 (en) 2013-03-15 2018-06-26 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US10020157B2 (en) 2013-03-15 2018-07-10 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US10096446B2 (en) 2013-03-15 2018-10-09 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US10102997B2 (en) 2013-03-15 2018-10-16 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal

Also Published As

Publication number Publication date
FR2591035A1 (fr) 1987-06-05
JPH0456418B2 (https=) 1992-09-08
DE3664396D1 (en) 1989-08-17
FR2591035B1 (fr) 1988-02-26
EP0228318B1 (fr) 1989-07-12
EP0228318A1 (fr) 1987-07-08
US4777370A (en) 1988-10-11

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