JPS62142844U - - Google Patents
Info
- Publication number
- JPS62142844U JPS62142844U JP3176786U JP3176786U JPS62142844U JP S62142844 U JPS62142844 U JP S62142844U JP 3176786 U JP3176786 U JP 3176786U JP 3176786 U JP3176786 U JP 3176786U JP S62142844 U JPS62142844 U JP S62142844U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- processing tank
- support plate
- tank
- grid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 239000012535 impurity Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3176786U JPS62142844U (ko) | 1986-03-04 | 1986-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3176786U JPS62142844U (ko) | 1986-03-04 | 1986-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62142844U true JPS62142844U (ko) | 1987-09-09 |
Family
ID=30837805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3176786U Pending JPS62142844U (ko) | 1986-03-04 | 1986-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62142844U (ko) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4817894U (ko) * | 1971-07-12 | 1973-02-28 | ||
| JPS59175126A (ja) * | 1983-03-23 | 1984-10-03 | Nec Corp | 半導体ウエハ用処理槽 |
-
1986
- 1986-03-04 JP JP3176786U patent/JPS62142844U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4817894U (ko) * | 1971-07-12 | 1973-02-28 | ||
| JPS59175126A (ja) * | 1983-03-23 | 1984-10-03 | Nec Corp | 半導体ウエハ用処理槽 |