JPS62142839U - - Google Patents
Info
- Publication number
- JPS62142839U JPS62142839U JP3176686U JP3176686U JPS62142839U JP S62142839 U JPS62142839 U JP S62142839U JP 3176686 U JP3176686 U JP 3176686U JP 3176686 U JP3176686 U JP 3176686U JP S62142839 U JPS62142839 U JP S62142839U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- pressure cvd
- support plate
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical group [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims 2
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3176686U JPS62142839U (it) | 1986-03-04 | 1986-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3176686U JPS62142839U (it) | 1986-03-04 | 1986-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62142839U true JPS62142839U (it) | 1987-09-09 |
Family
ID=30837803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3176686U Pending JPS62142839U (it) | 1986-03-04 | 1986-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62142839U (it) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0247029U (it) * | 1988-09-28 | 1990-03-30 | ||
| JPH02122431U (it) * | 1989-03-20 | 1990-10-08 | ||
| JPH0350324U (it) * | 1989-09-21 | 1991-05-16 |
-
1986
- 1986-03-04 JP JP3176686U patent/JPS62142839U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0247029U (it) * | 1988-09-28 | 1990-03-30 | ||
| JPH02122431U (it) * | 1989-03-20 | 1990-10-08 | ||
| JPH0350324U (it) * | 1989-09-21 | 1991-05-16 | ||
| JPH06818Y2 (ja) * | 1989-09-21 | 1994-01-05 | 日本エー・エス・エム株式会社 | Ｃｖｄ装置のための基板支持装置 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0926706A3 (en) | Substrate processing apparatus, substrate support apparatus, substrate processing method, and substrate manufacturing method | |
| JPH0745691A (ja) | ウェーハホルダ | |
| JPS62142839U (it) | ||
| JPH02133308U (it) | ||
| JPS6150760U (it) | ||
| JPH0467344U (it) | ||
| JPH0468519U (it) | ||
| JPS6161831U (it) | ||
| JPS6252929U (it) | ||
| JPS6190856U (it) | ||
| JPH0376139U (it) | ||
| JPS6171366U (it) | ||
| JPH0339833U (it) | ||
| JPS62151728U (it) | ||
| JPS62145334U (it) | ||
| JPS61144633U (it) | ||
| JPH0186236U (it) | ||
| JPS6188233U (it) | ||
| JPS63159828U (it) | ||
| JPS60124031U (ja) | 縦型炉 | |
| JPH01163331U (it) | ||
| JPS61114839U (it) | ||
| JPS6455553U (it) | ||
| JPS6057123U (ja) | 半導体用プロセスチュ−ブ | |
| JPS6089282U (ja) | 気相成長用サセプタ− |