JPS62141709U - - Google Patents
Info
- Publication number
- JPS62141709U JPS62141709U JP3037386U JP3037386U JPS62141709U JP S62141709 U JPS62141709 U JP S62141709U JP 3037386 U JP3037386 U JP 3037386U JP 3037386 U JP3037386 U JP 3037386U JP S62141709 U JPS62141709 U JP S62141709U
- Authority
- JP
- Japan
- Prior art keywords
- circuit board
- blocking member
- spindle
- main scale
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000903 blocking effect Effects 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3037386U JPS62141709U (sk) | 1986-03-03 | 1986-03-03 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3037386U JPS62141709U (sk) | 1986-03-03 | 1986-03-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62141709U true JPS62141709U (sk) | 1987-09-07 |
Family
ID=30835116
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3037386U Pending JPS62141709U (sk) | 1986-03-03 | 1986-03-03 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62141709U (sk) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06160016A (ja) * | 1992-11-25 | 1994-06-07 | Mitsutoyo Corp | 変位検出装置 |
JP2014140071A (ja) * | 2007-12-28 | 2014-07-31 | Nikon Corp | 露光方法及び露光装置、並びにデバイス製造方法 |
-
1986
- 1986-03-03 JP JP3037386U patent/JPS62141709U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06160016A (ja) * | 1992-11-25 | 1994-06-07 | Mitsutoyo Corp | 変位検出装置 |
JP2014140071A (ja) * | 2007-12-28 | 2014-07-31 | Nikon Corp | 露光方法及び露光装置、並びにデバイス製造方法 |
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