JPS62140721U - - Google Patents

Info

Publication number
JPS62140721U
JPS62140721U JP2700586U JP2700586U JPS62140721U JP S62140721 U JPS62140721 U JP S62140721U JP 2700586 U JP2700586 U JP 2700586U JP 2700586 U JP2700586 U JP 2700586U JP S62140721 U JPS62140721 U JP S62140721U
Authority
JP
Japan
Prior art keywords
substrate
heater
bearing
heat sink
manipulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2700586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2700586U priority Critical patent/JPS62140721U/ja
Publication of JPS62140721U publication Critical patent/JPS62140721U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP2700586U 1986-02-26 1986-02-26 Pending JPS62140721U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2700586U JPS62140721U (enrdf_load_stackoverflow) 1986-02-26 1986-02-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2700586U JPS62140721U (enrdf_load_stackoverflow) 1986-02-26 1986-02-26

Publications (1)

Publication Number Publication Date
JPS62140721U true JPS62140721U (enrdf_load_stackoverflow) 1987-09-05

Family

ID=30828631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2700586U Pending JPS62140721U (enrdf_load_stackoverflow) 1986-02-26 1986-02-26

Country Status (1)

Country Link
JP (1) JPS62140721U (enrdf_load_stackoverflow)

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