JPS62140352U - - Google Patents
Info
- Publication number
- JPS62140352U JPS62140352U JP2513486U JP2513486U JPS62140352U JP S62140352 U JPS62140352 U JP S62140352U JP 2513486 U JP2513486 U JP 2513486U JP 2513486 U JP2513486 U JP 2513486U JP S62140352 U JPS62140352 U JP S62140352U
- Authority
- JP
- Japan
- Prior art keywords
- foreign object
- mirror
- object detection
- plate surface
- rotating mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2513486U JPH048352Y2 (nl) | 1986-02-25 | 1986-02-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2513486U JPH048352Y2 (nl) | 1986-02-25 | 1986-02-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62140352U true JPS62140352U (nl) | 1987-09-04 |
JPH048352Y2 JPH048352Y2 (nl) | 1992-03-03 |
Family
ID=30825003
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2513486U Expired JPH048352Y2 (nl) | 1986-02-25 | 1986-02-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH048352Y2 (nl) |
-
1986
- 1986-02-25 JP JP2513486U patent/JPH048352Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPH048352Y2 (nl) | 1992-03-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS62140352U (nl) | ||
JPH0555069U (ja) | 回転体の回転速度検出装置 | |
JPS6095644U (ja) | 指示座標検出装置 | |
JPS63149459U (nl) | ||
JPH0120641Y2 (nl) | ||
JPS6442446U (nl) | ||
JPS6048104U (ja) | 光学式表面変位検出装置 | |
JPS6036248Y2 (ja) | レ−ザ照射装置 | |
JPS6288549U (nl) | ||
JPH0269702U (nl) | ||
JPS6319814U (nl) | ||
JPS63126813U (nl) | ||
JPS6341933U (nl) | ||
JPS58143080U (ja) | レ−ザ加工装置 | |
JPS62152208U (nl) | ||
JPH0235343U (nl) | ||
JPS6355123U (nl) | ||
JPS6327962U (nl) | ||
JPH01155562U (nl) | ||
JPS62190368U (nl) | ||
JPH02140628U (nl) | ||
JPS62140475U (nl) | ||
JPS60134118U (ja) | 回転検出装置 | |
JPS6451837U (nl) | ||
JPS6245737U (nl) |