JPS62140352A - Surface analyzing device - Google Patents

Abstract

PURPOSE:To secure a highly accurate sample analysis with no influence from a leakage electric field or magnetic field, and to make it possible to analyze adequately a sample with an irregular surface, by furnishing beam permeant holes to permeate either irradiation beams or emission beam at the inner tube and the outer tube electrodes respectively. CONSTITUTION:The electron beams from an electron beam source 6 outside an outer tube electrode 4 are radiated over a sample 7 through beam permeant holes of the electrode 4 and of an inner tube electrode 3 to emit Auger electrons from the sample 7, by which the element analysis of the sample 7 surface is performed by an electron detector 5. The analysis by the other kind irradiating beams is also performed by radiating necessary beams radiated from the outside of the energy spectroscope 1 through the beam permeant holes of the electrodes 3 and 4 to the sample 7 in the same manner. Therefore, the angle of the irradiating beams to the sample and the emitting beams from the sample can be set deep to the surface of the sample 7, and the influences of the electric field or the magnetic field owing to a leakage of the beam source to the inside of the electrode 3 and around the sample 7 can be prevented since the electron beam source is arranged outside the electrode 4.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an apparatus for analyzing the surface of a sample using energy spectroscopy of charged particles, such as Auger electron spectroscopy or photoelectron spectroscopy.

(Conventional technology) As this type of device, the one shown in FIG. 4 is well known.

In the figure, inside the spectrometer frame 2 of the cylindrical mirror type energy spectrometer 1, there is an inner cylinder electrode 3;
An outer cylindrical electrode 4 surrounding the cylindrical electrode 4 is provided. Normally, the inner tube electrode 3 is connected to a ground wire, while a negative voltage is applied to the outer tube electrode 4, and an electric field is formed between the inner tube electrode 3 and the outer tube electrode 4. ing.

An electron detector 5 is disposed at a negative position inside the inner tube electrode 3, and an electron beam source 6 as an irradiation beam supply means is housed below the electron detector 5.

A sample 7 is installed directly below the cylindrical mirror energy spectrometer 1. Therefore, by irradiating the sample 7 with an electron beam 6A from the electron beam source 6, detection consisting of Auger electrons from the sample 7 is detected. electronic 5A
is released.

Then, the emitted detection electrons 5A enter the space between the inner cylinder electrode 3 and the outer cylinder electrode 4 through the lower sleeve 1 to the hole 8 of the inner cylinder electrode 3, and are subjected to orbit control by an electric field to be energy separated. After that, it passes through the upper sleeve I and hole 9 of the inner cylinder electrode 3 again and enters the electron detector 5. The electron detector 5 detects the incident detection electrons 5A and identifies the elements of the sample.

On the other hand, an ion beam source 10 as another irradiation beam supplying means is arranged outside the cylindrical mirror energy spectrometer 1, and an ion beam source 10 as a radiation beam detection means is placed on the opposite side of the sample 7. Mass spectrometer 11
is located.

Therefore, ion beam source] ion beam from 0],
OA is irradiated onto the sample 7, and the radiation beam emitted from the sample 7, i.e. secondary ions or secondary molecules (hereinafter referred to as secondary ions 1), is emitted from the sample 7.
1A) by the mass spectrometer 11, elemental identification of the sample 7 is achieved. In this way, element identification using detected electron 5A and secondary ion 1 ],
By using element identification using A in combination, the constituent components of sample 7 can be determined more accurately.

Furthermore, an X-ray beam source (not shown) as another irradiation beam supply means is superimposed on the apparatus shown in FIG. Sometimes it is installed, and the sample 7 is irradiated with X-rays.
In some cases, photoelectrons (not shown) emitted from the element are detected in the same way as Auger electrons and used to participate in element identification.

(Problems to be Solved by the Invention) However, in the conventional device described in 1., the electron beam source 6 is disposed inside the inner cylinder electrode 3, so the electric field and magnetic field inside the electron beam source 6 are There is a problem in that the leaked electric field and magnetic field that leak into the cylindrical electrode 3 affect the trajectory of the detected electrons 5A, thereby deteriorating the accuracy of elemental analysis of the sample. Also, from the ion beam source 10 to the sample 7
Ion beam towards 1. OA irradiation and sample 7
The secondary ions 11A are emitted toward the mass spectrometer 11 through a narrow space 3o between the lower end of the cylindrical mirror energy spectrometer 1 and the sample 7. For this reason, the trajectories of the ion beam OA and secondary ions IIA entering and exiting the sample 7 are at very shallow angles (usually 5 to 10 degrees), and the trajectories of the ion beam OA and secondary ions IIA are at very shallow angles (usually 5 to 10 degrees). There was a problem that proper analysis became difficult. A similar problem existed when an X-ray beam source was installed.

This invention was made in order to solve the above-mentioned conventional problems, and its purpose is to ensure highly accurate sample analysis without being affected by leakage electric fields or leakage magnetic fields, and to analyze samples with uneven surfaces. It is an object of the present invention to provide a surface analysis device that can perform appropriate analysis even for.

(Means for Solving the Problems) In order to achieve the above object, the present invention is configured as follows. That is, the present invention detects electrons emitted from an inner tube electrode, an outer tube electrode surrounding the inner tube electrode, and a sample placed within the inner tube electrode and located below the inner tube electrode. a cylindrical mirror type energy spectrometer having an electron detector; an irradiation beam supply means disposed outside the cylindrical mirror type energy spectrometer for supplying a beam to irradiate the sample or detecting a beam emitted from the sample; at least one of the radiation beam detection means; and in the surface analysis device, each of the inner tube electrode and the outer tube electrode is provided with a beam transmission hole through which at least one of the irradiation beam or the radiation beam passes through. This is a surface analysis device that has been used for many years.

(Function) In the present invention having the above configuration, surface analysis of a sample is performed as follows. First, in surface analysis using an electron beam as an irradiation beam supply means, the electron beam emitted from the electron beam source located outside the outer cylinder electrode is passed through the beam transmission hole of the outer cylinder electrode and the inner cylinder electrode to the sample. This is done by irradiating the Auger electrons are emitted from the sample by this irradiation, and elemental analysis of the surface of the sample 1 is performed using an electron detector as in the conventional example. Similarly, when performing surface analysis using an irradiation beam emitted from another irradiation beam supply means, the required irradiation beam is emitted from outside the cylindrical mirror energy spectrometer, and this irradiation beam is applied to the outer tube electrode. This is done by irradiating the sample through the beam transmission hole of the inner cylinder electrode. By irradiating the sample, a radiation beam corresponding to the irradiation beam is emitted from the sample, and this emitted radiation beam is introduced into a radiation beam detection means or an electronic detector through a beam transmission hole, and the intended elemental analysis is carried out. It will be done.

In this way, the analysis of a sample in the present invention involves the use of various beams irradiating the sample and radiation beams emitted outward from the sample (excluding Auger electrons and photoelectrons, which are subjected to energy spectroscopy). (Generally, at least one of them) The beam is transmitted through the outer tube electrode and the beam transmission hole provided in the outer tube electrode, so the angle of the beam irradiating the sample and the angle of the radiation beam emitted from the sample are set at a deep angle relative to the sample surface. (large angle). In addition, since the electron beam source is placed outside the outer tube electrode, it is possible to prevent the adverse effects of electric and magnetic fields caused by leakage from the electron beam source affecting the inside of the inner tube electrode and the vicinity of the sample.

(Example) Hereinafter, an example of the present invention will be described based on the drawings. In each of the embodiments described below, the same components as those of the conventional example and the same components between the embodiments are designated by the same reference numerals, and the explanation thereof will be omitted. A first embodiment of the present invention is shown in FIGS. 1(a) and 1(b).

The first difference between this first embodiment and the conventional example is that an electron beam source 6 as an irradiation beam supply means is arranged outside the spectrometer frame 2, and the electron beam source 6 is directed toward the sample 7. An electron beam transmission hole through which the emitted electron beam 6A passes is provided at a predetermined portion of the cylindrical mirror energy spectrometer 10.

In this embodiment, a first electron beam transmission hole 12 is provided in the spectrometer frame 2, a second electron beam transmission hole 13 is provided in the outer tube electrode 4, and an inner tube electrode 3 is provided with a second electron beam transmission hole 13. is provided with a third electron beam transmission aperture 14, and a high energy electron beam 6A of 5" 50 K e V is transmitted from the electron beam source 6 to the sample 7 through each of these electron beam transmission holes 12, 13 and 14. is now irradiated.

In this case, when the beam aperture angle at the irradiation position of the sample 7 is θ, the first electron beam transmission hole 12 and the second
The electron beam transmission aperture 13 and the third electron beam transmission aperture 14 are each configured to have an angle of view at which the sample 7 is irradiated at a viewing angle of θ or more, and the electron beam 6A is aimed at the sample 7. The beam can be irradiated without any problem in position. These first electron beam transmission holes 1
The positions of the second and third electron beam transmission holes 14 are set to appropriate positions depending on the conditions given to the cylindrical mirror type energy spectrometer 1, but usually each electron beam transmission hole 12. It is convenient to set the straight line connecting the centers of the cylindrical mirror energy spectrometer 1 to be inclined by 40° to 45° with respect to the central axis of the cylindrical mirror energy spectrometer 1. In addition, if it is necessary to particularly reduce the disturbance of the electric field between the inner cylinder electrode 3 and the outer cylinder electrode 4, it is necessary to insert a metal mesh into each hole provided in the inner cylinder electrode 3 and the outer cylinder electrode 4. 15 are provided.

Further, the third electron beam transmission hole] 4 may be provided separately from the lower slit hole 8 of the inner tube electrode 3 (as shown in FIG. 1), but the lower slit hole 8 may also serve as the third electron beam transmission hole. good.

In this embodiment having the above-mentioned first characteristic point, an electron beam 6A is irradiated from the electron beam source 6 to the °C sample 7 through the first electron beam transmission hole J2 to the third electron beam transmission hole 14. Low-energy charged particles and high-energy charged particles are emitted from 7, but among them, low-energy charged particles such as Auger electrons (usually 0
．． ]~l r(e V) is the lower slit 1 of the internal mold fi3
The electrons enter the space between the inner tube electrode 3 and the outer tube electrode 4 through one hole 8, but are then subjected to trajectory control due to the potential difference between the inner tube electrode 3 and the outer tube type f24, and the detected electron 5A has a trajectory close to a parabola. After drawing and energy spectroscopy, the internal mold jf! 3 and is detected by the electronic detector 5. Then, the detected electrons 5A are detected by the electron detector 5 in the same manner as in the conventional example.

Next, the second feature of the embodiment of Section 1 is that the other irradiation beam supply means and the radiation beam detection means are arranged outside the spectrometer frame 2, and the sample 7 is irradiated from the irradiation beam supply means. The inner tube electrode 3, the outer tube electrode 4, and the spectrometer frame 2 are provided with beam transmission holes through which the beam transmitted from the sample 7 and the radiation beam emitted from the sample 7 to the radiation beam detection means are transmitted.

In this embodiment, the irradiation beam supply means includes an ion beam source 10 that emits an ion beam of 10A with high energy (usually 5 to 50'eV) and an X-ray beam of 1.6A as neutral particles (photons). It consists of an X-ray beam source 16 and a visible light beam source 17 that emits visible light 17A as neutral particles (photons). The spectrometer frame 2 is provided with first irradiation beam supply transmission holes 18 at corresponding positions on the peripheral wall, through which each beam from the ion beam source Co-0, the X-ray beam source 16, and the visible light beam source 17 is transmitted. Similarly, the outer cylinder electrode 4 is provided with one second irradiation beam supply transmission hole, and the inner cylinder electrode 3 is similarly provided with a third irradiation beam supply transmission hole 20, and each beam is Source 10. Same 16th
And each beam from the same 17 is transmitted to the corresponding first irradiation beam supply transmission hole 18 to third irradiation beam supply transmission hole 20.
The sample 7 is irradiated through the rays. Further, the radiation beam detection means is composed of a mass spectrometer 11 and a microscope 21.

The mass spectrometer 11 analyzes high-energy secondary ions IIA (secondary ions or neutral molecules) emitted from the sample 7, as in the conventional example, and the microscope 2
1 is a reflected beam 21 which is a neutral particle reflected from the sample 7.
．． It receives light A and observes the appearance of the sample surface.

In order to guide the secondary ions 11A emitted from the sample 7 and the reflected beam 21 reflected from the sample 7 to the corresponding mass spectrometer 11 and microscope 21, a first radiation beam transmission hole 22 is provided in the spectrometer frame 2. Further, the outer cylinder type wI4 is provided with a second radiation beam transmission hole 23, and the inner cylinder electrode 3 is further provided with a third radiation beam transmission hole 24. With such a configuration, the mass spectrometer 11
The mass spectrometry of the secondary ions IIA is performed using a microscope 21, and the appearance and morphology of the surface of the sample 7 are observed using a microscope 21.
Photoelectrons 25A emitted from the sample 7 by irradiation with the X-ray beam 16A are guided to the electron detector 5 through almost the same trajectory as the Auger electrons, and the photoelectrons 25A are detected.

These Auger electrons and photoelectrons 25A together constitute detection electrons 5A. In this way, in addition to the Auger electron analysis, mass analysis of the secondary ion 11A, photoelectron 25A
By performing the analysis and observing the appearance and morphology, it becomes possible to analyze the sample 7 more accurately.

Furthermore, according to the embodiment of Section 1, since the electron beam source 6, the X-ray beam source 16, and the visible light beam source 17 are all arranged outside the spectrometer frame 2, Even if the electric field or magnetic field leaks, this leakage will not have an adverse effect on the inside of the inner cylinder electrode 3 or the vicinity of the sample 7, and thus the sample analysis can be performed with high precision.

Further, the electron beam 6A, the ion beam IOA, the X-ray beam 1.6A and the visible light 17A are transmitted through the first electron beam transmission aperture 12 to the third electron beam transmission aperture 14 or generally into the first irradiation beam. The supply transmission hole 18 to the third irradiation beam supply transmission hole 20 are supplied to the sample 7, and each beam from the sample 7 (excluding Auger electrons and photoelectrons which are energy-separated) is the first radiation beam. The radiation beam is configured to be guided through the beam transmission aperture 22 to the third radiation beam transmission aperture 24 to the corresponding detection means. Therefore, by appropriately designing the position of each hole for beam irradiation and emission, it is possible to increase the irradiation angle (incident angle) of each beam that irradiates the sample. The emission angle (or reflection angle) of the beam can be increased (deepened). As a result, even if the sample surface has irregularities, the sample can be analyzed effectively.

FIG. 2 shows the configuration of a second embodiment of the present invention. The difference between this second embodiment and the first embodiment is as follows:
Objective lens 26 forming part of the radiation beam supply means and objective lens 2 forming part of the radiation beam detection means.
7 are arranged inside the inner cylinder electrode 3, respectively.

In the embodiment of the bookcase 2, the irradiation beam supply means is constituted by an ion beam source 10, and the radiation beam detection means is constituted by a mass spectrometer 11. In general, the ion beam source 10 has an ion generating section, an ion extracting section, an ion beam focusing lens section, etc. built into its frame 10a, as well as an objective lens that ultimately focuses the beam on the sample 7. has been done.

However, this objective lens does not necessarily need to be constructed integrally with other components.

Therefore, in the embodiment of the bookcase 2, the objective lens 2
6 is separated from the frame 10a, and the objective lens 26 is placed on the trajectory of the ion beam IOA and inside the inner cylinder electrode 3.

Similarly, the objective lens 27 of the mass spectrometer 11 is also placed on the trajectory of the secondary ions 11A and in the internal space of the internal pole 3. By providing the objective lenses 26 and 27 within the inner cylinder electrode 3 in this way, the following advantages can be obtained. That is, in the objective lens 26, firstly, the distance between the objective lens 26 and the sample 7, that is, the working distance can be shortened, so that the ion beam 10 irradiating the sample 7 can be shortened.
Second, when the ion beam IOA passes through the electric field between the inner cylinder electrode 3 and the outer cylinder electrode 4, even if the ion beam IOA is affected by the electric field, Even if some disturbance occurs, the objective lens 2
6 makes it possible to reduce the influence of the electric field by narrowing down the ion beam IOA.

In addition, the objective lens 27 can efficiently collect the secondary ions 11A emitted from the sample 7 and send the high-density secondary ions 11A to the mass spectrometer 11. The synergistic effect of these objective lenses 26 and 27 makes it possible to perform elemental analysis of the sample 7 with high precision.

Note that this type of arrangement of the objective lenses 26 and 27 can also be applied to the objective lenses of other radiation beam supply means and radiation beam detection means, whereby similar excellent effects can be obtained.

When arranging the objective lenses 26 and 27, it is also possible to add, for example, a deflection plate, an astigmatism plate, an aperture, etc. to the objective lenses 26 and 27, if necessary.

FIGS. 3(a) and 3(b) show the configuration of a third embodiment of the present invention. This third embodiment is similar to the first embodiment.
This embodiment differs from the second embodiment in that an X-ray beam source 16 as an irradiation beam supply means is constructed using an epi-irradiation crystal plate 28. That is, in the figure,
The X-ray beam source 16 is composed of an X-ray generator 29 and a reflective crystal plate 28. is being released. The reflective crystal plate 28 not only performs X-ray spectroscopy by Bragg reflection, but also
It is a two-dimensional condensing curved crystal plate that focuses dimensional X-rays, and a plurality of crystal plates are arranged continuously or discontinuously axially symmetrically with respect to the central axis of the cylindrical mirror energy spectrometer 1. A large proportion of the X-rays emitted from the two X-ray generators are separated and focused toward the sample 7, and an annular or truncated annular X-ray beam 16A is directed toward the sample 7. It is designed to be irradiated by

In addition, the irradiation angle of the X-ray beam 16A to the sample 7 (the angle between the central axis of the cylindrical mirror energy spectrometer 1 and the X-ray beam 16A) is 40 to 45 degrees, and at this angle the X-ray beam 16A is irradiated onto the sample 7 through the second irradiation beam supply transmission hole 19 of the outer cylinder electrode 4 and the third irradiation beam supply transmission hole 20 of the inner cylinder electrode 3.

Photoelectrons 2 emitted from the sample 7 due to this irradiation
5A, that is, the detection electrons 5A enter between the inner cylinder electrode 3 and the outer cylinder electrode 4 through the lower slit hole 8, and then,
The detected electrons 5A in the first embodiment are subjected to the same orbital control and taken into the electron detector 5.

Therefore, in the embodiment of Mizui 3, the beam irradiation angle to the sample 7 and the beam emission angle from the sample 7 can be increased as in the first and second embodiments. It is possible to perform elemental analysis and the like with high accuracy even for the sample 7 that has a certain amount.

In addition, in the embodiment of Sui-Tei 3, the reflective crystal plate 28 does not necessarily have to be a two-dimensional condensing type curved crystal plate, but may be a one-dimensional condensing type crystal plate, or may be composed of a non-concentrating type crystal plate. You may.

Furthermore, in the first to third embodiments,
The outer cylindrical electrode 4 is formed of a cylindrical plate, and the third irradiation beam supply transmission hole 20 and the third radiation beam hole 24 are provided in this cylindrical plate, and the entire outer cylindrical electrode 4 is formed of a metal mesh. You can also do that.

(Effects of the Invention) Since the present invention has the configuration and operation described above, it is possible to analyze the sample surface with high precision, and when the sample surface has unevenness, for example, three-dimensional It is also possible to analyze the surface of ICs with structures and steel with sharp fractured surfaces with extremely high precision.

[Brief explanation of drawings]

1(a) and 1(b) show the configuration of a device according to a first embodiment of the present invention, in which FIG. 1(a) is a plan view including a partial cross section, and FIG. 1(b) is a plan view including a partial cross section. FIG. 2 is a sectional view showing the configuration of a device according to a second embodiment of the present invention;
FIGS. 3(a) and 3(b) show the device configuration of a third embodiment of the present invention, of which FIG. 3(a) is a plan view;
FIG. 4B is an elevational view including a cross section of the main part, and FIG. 4 is a cross-sectional view showing the configuration of a conventional device. 1... Cylindrical mirror type energy spectrometer, 2... Spectrometer frame, 3... Inner tube electrode, 4... Outer tube electrode, 5. ...Electron detector, 5A...Detection electron, 6...
...electron beam source, 6A...electron beam,
7... Sample, 8... Lower slit hole, 9... Upper slit hole, 10...
...Ion beam source, IOA...Ion beam, 10a...Frame, 11...Mass spectrometer, 11A...Secondary ion, 12・・・
...First electron beam transmission hole, 13...Second electron beam transmission hole, 14...Third electron beam transmission hole, 15...Metal Metush, 16
...X-ray beam source, 16A...X-ray beam, 17...Visible light beam source, 17A.
...Visible light, 18...First irradiation beam supply transmission hole, 19...Second irradiation beam supply transmission hole, 20...Third Irradiation beam supply transmission hole, 21...Microscope, 21A...
Reflected beam, 22...First radiation beam transmission hole, 23...Second radiation beam transmission hole, 24
...Third radiation beam transmission hole, 25A...
...Photoelectron, 26.27...Objective lens, 28
......Reflecting crystal plate, 29...X-ray generation section, 30... Space section.

Claims (3)

[Claims] (1) An electron detector that detects electrons emitted from an inner tube electrode, an outer tube electrode surrounding the inner tube electrode, and a sample placed within the inner tube electrode and located below the inner tube electrode. a cylindrical mirror energy spectrometer having;
At least one means of an irradiation beam supply means for supplying a beam to irradiate the sample or a radiation beam detection means for detecting a beam emitted from the sample, which is disposed outside the cylindrical mirror type energy spectrometer; 1. A surface analysis device comprising: a beam transmission hole that transmits at least one of the irradiation beam and the radiation beam; (2) At least one of the irradiation beam supply means and the radiation beam detection means has an objective lens that focuses the beam, and the objective lens is provided inside an inner cylinder electrode constituting a cylindrical mirror type energy spectrometer. A surface analysis device according to claim (1), characterized in that: (3) The irradiation beam supply means is arranged symmetrically with respect to the central axis of the cylindrical mirror energy spectrometer; a crystal plate that reflects X-rays emitted from the tube and guides the reflected X-rays to the sample through the beam transmission holes of the inner tube electrode and the outer tube electrode; The surface analysis device according to scope (1).